Laser & Optoelectronics Progress, Volume. 62, Issue 7, 0700005(2025)

Technologies and Applications of Advanced Laser for Substrate Patterning

Jiaxiang Wang1, Gufeng He1, Faheng Zang1,2, Yunna Sun1,2, Zhuoqing Yang1,2、*, and Xiaojun Guo1,2、**
Author Affiliations
  • 1School of Integrated Circuits, Shanghai Jiao Tong University, Shanghai 200240, China
  • 2National Key Laboratory of Advanced Micro and Nano Manufacture Technology, Shanghai Jiao Tong University, Shanghai 200240, China
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    With the rapid advancements in fields such as high-performance computing, artificial intelligence, and intelligent vehicles, the demand for high-resolution graphical technology and contactless processing has increased. Advanced laser ablation for substrate patterning has gradually become an important method for achieving miniaturization and high integration of electronic devices. This paper introduces the research progress on processing different materials, such as organic and inorganic substrates, using advanced laser patterning technology. It specifically discusses the effects of different lasers on various substrate materials. Further, it reviews the application methods and effects of advanced laser patterning technology in areas such as through glass via advanced packaging technology, flexible sensors, microfluidic devices, and micro-nano optics and resonant devices. Finally, the future potential of advanced laser patterning technology is discussed, offering valuable insights for researchers working in related fields.

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    Jiaxiang Wang, Gufeng He, Faheng Zang, Yunna Sun, Zhuoqing Yang, Xiaojun Guo. Technologies and Applications of Advanced Laser for Substrate Patterning[J]. Laser & Optoelectronics Progress, 2025, 62(7): 0700005

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    Paper Information

    Category: Reviews

    Received: Nov. 21, 2024

    Accepted: Dec. 11, 2024

    Published Online: Apr. 10, 2025

    The Author Email: Zhuoqing Yang (yzhuoqing@sjtu.edu.cn), Xiaojun Guo (x.guo@sjtu.edu.cn)

    DOI:10.3788/LOP242294

    CSTR:32186.14.LOP242294

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