[1] [1] H. Zappe, Fundamentals of Micro-optics (Cambridge University, 2010) pp. 283-300.

[2] [2] C. G. Chen, P. T. Konkola, R. K. Heilmann, C. Joo, and M. L. Schattenburg, Proc. SPIE 4936, 126 (2002).

[3] [3] J. Ferrera, M. L. Schattenburg, and H. I. Smitha, J. Vac. Sci. Technol. B 14, 4009 (1996).

[4] [4] G. D. Marshall, P. Dekker, M. Ams, J. A. Piper, and M. J. Withford, Opt. Lett. 33, 956 (2008).

[5] [5] I. Staude, G. V. Freymann, S. Essig, K. Busch, and M. Wegener, Opt. Lett. 36, 67 (2011).

[6] [6] X. Sun, C. Zhou, H. Ru, Y. Zhang, and B. Yu, Chin. Opt. Lett. 2, 4 (2004).

[7] [7] C. G. Chen, P. T. Konkola, R. K. Heilmann, G. S. Pati, and M. L. Schattenburg, J. Vac. Sci. Technol. B 19, 2335 (2001).

[8] [8] B. Yu, W. Jia, C. Zhou, H. Cao, and W. Sun, Chin. Opt. Lett. 11, 080501 (2013).

[9] [9] D. Gil, R. Menon, X. D. Tang, H. I. Smith, and D. J. D. Carter, J. Vac. Sci. Technol. B 20, 2597 (2002).

[10] [10] J. Lutkenhaus, D. George, M. Moazzezi, U. Philipose, and Y. Lin, Opt. Express 21, 26227(2013).

[11] [11] C. S. Lim, M. H. Hong, Y. Lin, Q. Xie, B. S. Luk'yanchuk, Kumar A. Senthil, and M. Rahman, Appl. Phys. Lett. 89, 191125(2006).

[12] [12] M. Tang, Z. C. Chen, Z. Q. Huang, Y. S. Choo, and M. H. Hong, Appl. Opt. 50, 6536 (2011).

[13] [13] F. J. Wen, Z. Y. Chen, and P. S. Chung, Appl. Opt. 49, 648 (2010).

[14] [14] C. H. Zhou and L. R. Liu, Appl. Opt. 34, 5961 (1995).

[15] [15] J. J. Feng, C. H. Zhou, B. Wang, J. J. Zheng, W. Jia, H. C. Cao, and P. Lv, Appl. Opt. 47, 6638 (2008).