Chinese Optics Letters, Volume. 12, Issue 8, 080501(2014)
Parallel laser writing system with scanning Dammann lithography
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Feng Zhu, Jianyong Ma, Wei Huang, Jin Wang, Changhe Zhou, "Parallel laser writing system with scanning Dammann lithography," Chin. Opt. Lett. 12, 080501 (2014)
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Received: Feb. 28, 2014
Accepted: Apr. 23, 2014
Published Online: Jul. 31, 2014
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