Fig. 1. (a) Schematic diagram; (b) picture of the designed fiber-based THz-TDS ellipsometer.

Fig. 2. RE as a function of θ when ρtheory=0.1 and σ1=σ2=0.5°.

Fig. 3. Flow chart of the algorithm steps.

Fig. 4. Characterized k(ω) as a function of frequency.

Fig. 5. Illustration of the E fields and the related directions considered in the algorithm.

Fig. 6. (a) Measured Ers, Erp, Eβ (multiplied by a factor of 10) and the calibrated Erp and Ers, with the measured and calibrated Erp zoom in the inset; (b) Diff as a function of pulse shift τp and τβ; (c) measured and calculated Eβ by the calibrated Ers and Erp.

Fig. 7. (a) tan Ψ; (b) Δ; (c) refractive index; (d) absorption coefficient of HR-Si calculated by the calibrated and uncalibrated ellipsometry data, compared with the transmission results.

Fig. 8. (a) Refractive index and (b) absorption coefficient of Glaverbel glass characterized by ellipsometry and transmission.

Fig. 9. Complex refractive index and complex conductivity of thin-film ITO. The circles are the experimental data, and the solid curves are the Drude-model fitting results by the data in the yellow region.