Infrared Technology, Volume. 46, Issue 3, 342(2024)
Dark Current of Aluminum Oxide Passivation Film BCMOS Sensor Increased by Low Energy Electron Bombardment
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YAN Lei, SHI Feng, CHENG Hongchang, JIAO Gangcheng, YANG Ye, XIAO Chao, FAN Haibo, ZHEN Zhou, DONG Haichen, HE Huiyang. Dark Current of Aluminum Oxide Passivation Film BCMOS Sensor Increased by Low Energy Electron Bombardment[J]. Infrared Technology, 2024, 46(3): 342
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Received: May. 6, 2022
Accepted: --
Published Online: Sep. 2, 2024
The Author Email: Feng SHI (shfyf@126.com)
CSTR:32186.14.