Dark Current of Aluminum Oxide Passivation Film BCMOS Sensor Increased by Low Energy Electron Bombardment

Lei YAN; Feng SHI; Hongchang CHENG; Gangcheng JIAO; Ye YANG; Chao XIAO; Haibo FAN; Zhou ZHEN; Haichen DONG; Huiyang HE

Infrared Technology, Volume. 46, Issue 3, 342(2024)

Lei YAN1...2, Feng SHI1,2,*, Hongchang CHENG1,2, Gangcheng JIAO1,2, Ye YANG1,2, Chao XIAO1,2, Haibo FAN1,2, Zhou ZHEN1,2, Haichen DONG1,2, and Huiyang HE12 |Show fewer author(s)

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YAN Lei, SHI Feng, CHENG Hongchang, JIAO Gangcheng, YANG Ye, XIAO Chao, FAN Haibo, ZHEN Zhou, DONG Haichen, HE Huiyang. Dark Current of Aluminum Oxide Passivation Film BCMOS Sensor Increased by Low Energy Electron Bombardment[J]. Infrared Technology, 2024, 46(3): 342

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