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Chinese Optics Letters, Volume. 15, Issue 10, 101201(2017)

Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer

Ming Zhang1,2、*, Chang Ni1,2, Yu Zhu1,2, Leijie Wang1,2, Chuxiong Hu1,2, and Jinchun Hu1,2
Author Affiliations
  • 1State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
  • 2Beijing Laboratory of Precision/Ultra-Precision Manufacture Equipment and Control, Tsinghua University, Beijing 100084, China
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    CLP Journals

    [1] Jiakun Li, Qibo Feng, Chuanchen Bao, Bin Zhang, "Method for simultaneously and directly measuring all six-DOF motion errors of a rotary axis," Chin. Opt. Lett. 17, 011203 (2019)

    Cited By

    [1] Jili Deng, Xiaona Yan, Chunlong Wei, Yangcong Lu, Mingkang Li, Xiansong Xiang, Wei Jia, Changhe Zhou. Eightfold optical encoder with high-density grating. Applied Optics, 57, 2366(2018).

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    Ming Zhang, Chang Ni, Yu Zhu, Leijie Wang, Chuxiong Hu, Jinchun Hu, "Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer," Chin. Opt. Lett. 15, 101201 (2017)

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    Paper Information

    Category: Fiber Optics and Optical Communications

    Received: Apr. 23, 2017

    Accepted: Jun. 16, 2017

    Published Online: Jul. 19, 2018

    The Author Email: Ming Zhang (zm01@mails.tsinghua.edu.cn)

    DOI:10.3788/COL201715.101201

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology