Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer

Ming Zhang; Chang Ni; Yu Zhu; Leijie Wang; Chuxiong Hu; Jinchun Hu

doi:10.3788/COL201715.101201

Chinese Optics Letters, Volume. 15, Issue 10, 101201(2017)

Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer

Ming Zhang^1,2、*, Chang Ni^1,2, Yu Zhu^1,2, Leijie Wang^1,2, Chuxiong Hu^1,2, and Jinchun Hu^1,2

Author Affiliations

¹State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China

²Beijing Laboratory of Precision/Ultra-Precision Manufacture Equipment and Control, Tsinghua University, Beijing 100084, China

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Ming Zhang, Chang Ni, Yu Zhu, Leijie Wang, Chuxiong Hu, Jinchun Hu, "Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer," Chin. Opt. Lett. 15, 101201 (2017)

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Paper Information

Category: Fiber Optics and Optical Communications

Received: Apr. 23, 2017

Accepted: Jun. 16, 2017

Published Online: Jul. 19, 2018

The Author Email: Ming Zhang (zm01@mails.tsinghua.edu.cn)

DOI:10.3788/COL201715.101201

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology