Optical Communication Technology, Volume. 49, Issue 1, 94(2025)
Design of film thickness and curvature measurement system based on ellipsometry spectrum and optical lever method
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SUN Wei, JIN Shangzhong, ZHANG Yin, SUN Zijuan, XU Sheng. Design of film thickness and curvature measurement system based on ellipsometry spectrum and optical lever method[J]. Optical Communication Technology, 2025, 49(1): 94
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Received: Feb. 6, 2024
Accepted: Jun. 17, 2025
Published Online: Jun. 17, 2025
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