Mid-infrared suspended silicon nanomembrane microring resonators with grating couplers

Qiyue Lang; Changguang Zou; Zunyue Zhang; Jiaqi Wang; Kun Liu; Junfeng Jiang; Tiegen Liu; Zhenzhou Cheng

doi:10.3788/COL202523.101302

Chinese Optics Letters, Volume. 23, Issue 10, 101302(2025)

Mid-infrared suspended silicon nanomembrane microring resonators with grating couplers

Qiyue Lang^1,2, Changguang Zou^1,2, Zunyue Zhang^1,2、*, Jiaqi Wang^3、**, Kun Liu^1,2, Junfeng Jiang^1,2, Tiegen Liu^1,2, and Zhenzhou Cheng^{1,2,4,5、***}

Author Affiliations

¹School of Precision Instrument and Opto-electronics Engineering, Tianjin University, Tianjin 300072, China

²Key Laboratory of Opto-electronic Information Technology, Ministry of Education, Tianjin 300072, China

³College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China

⁴Georgia Tech-Shenzhen Institute, Tianjin University, Shenzhen 518055, China

⁵Department of Chemistry, The University of Tokyo, Tokyo 113-0033, Japan

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Qiyue Lang, Changguang Zou, Zunyue Zhang, Jiaqi Wang, Kun Liu, Junfeng Jiang, Tiegen Liu, Zhenzhou Cheng, "Mid-infrared suspended silicon nanomembrane microring resonators with grating couplers," Chin. Opt. Lett. 23, 101302 (2025)

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