Chinese Optics Letters, Volume. 23, Issue 10, 101302(2025)
Mid-infrared suspended silicon nanomembrane microring resonators with grating couplers
Fig. 1. Schematic of the SNS devices. (a) 3D view of the SNS waveguide, SNS MRR, and SWG coupler. (b) Top view of the SWG coupler. (c) Zoomed-in view of the coupling region between the cavity and bus waveguide.
Fig. 2. Simulation results of the SWG coupler and SNS MRR. (a) Simulation results of the coupling directionality and coupling strength with different fill factors fx. (b) Simulation results of the coupling efficiency with different lateral fill factors, fy. (c) Far-field diffraction electric-field distribution of the SWG coupler. (d) Relation between the leakage loss and the thickness TSi at WWG of 2.5 and 3.0 µm. (e) Optical electric-field distribution of the TE0 mode in the SNS MRR. (f) Relation between the self-coupling power ratio t2 and the gap width WGap under the coupling length L of 6 and 7 µm.
Fig. 3. SEM images of the SWG coupler and SNS MRR. (a) SWG coupler. (b) Zoomed-in view of the coupling region of the SNS MRR. (c) SNS MRR.
Fig. 4. Measurement of the SWG coupler and SNS MRR. (a) Schematic of the mid-IR waveguide device testing system. The inset shows the characterization of the tunable mid-IR laser diode. (b) Measured and 3D-FDTD simulated coupling efficiency of the SWG coupler with varying incident angles. (c) Transmission spectrum of the SNS MRR. (d) Q of the SNS MRRs with different coupling lengths L and gap widths WGap. (e) Temperature stability measurement of the SNS MRR.
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Qiyue Lang, Changguang Zou, Zunyue Zhang, Jiaqi Wang, Kun Liu, Junfeng Jiang, Tiegen Liu, Zhenzhou Cheng, "Mid-infrared suspended silicon nanomembrane microring resonators with grating couplers," Chin. Opt. Lett. 23, 101302 (2025)
Category: Integrated Optics
Received: Apr. 7, 2025
Accepted: May. 30, 2025
Posted: May. 30, 2025
Published Online: Sep. 9, 2025
The Author Email: Zunyue Zhang (zyzhang2023@tju.edu.cn), Jiaqi Wang (jqwang@szu.edu.cn), Zhenzhou Cheng (zhenzhoucheng@tju.edu.cn)