Chinese Optics Letters, Volume. 23, Issue 10, 101302(2025)

Mid-infrared suspended silicon nanomembrane microring resonators with grating couplers

Qiyue Lang1,2, Changguang Zou1,2, Zunyue Zhang1,2、*, Jiaqi Wang3、**, Kun Liu1,2, Junfeng Jiang1,2, Tiegen Liu1,2, and Zhenzhou Cheng1,2,4,5、***
Author Affiliations
  • 1School of Precision Instrument and Opto-electronics Engineering, Tianjin University, Tianjin 300072, China
  • 2Key Laboratory of Opto-electronic Information Technology, Ministry of Education, Tianjin 300072, China
  • 3College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China
  • 4Georgia Tech-Shenzhen Institute, Tianjin University, Shenzhen 518055, China
  • 5Department of Chemistry, The University of Tokyo, Tokyo 113-0033, Japan
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    Figures & Tables(4)
    Schematic of the SNS devices. (a) 3D view of the SNS waveguide, SNS MRR, and SWG coupler. (b) Top view of the SWG coupler. (c) Zoomed-in view of the coupling region between the cavity and bus waveguide.
    Simulation results of the SWG coupler and SNS MRR. (a) Simulation results of the coupling directionality and coupling strength with different fill factors fx. (b) Simulation results of the coupling efficiency with different lateral fill factors, fy. (c) Far-field diffraction electric-field distribution of the SWG coupler. (d) Relation between the leakage loss and the thickness TSi at WWG of 2.5 and 3.0 µm. (e) Optical electric-field distribution of the TE0 mode in the SNS MRR. (f) Relation between the self-coupling power ratio t2 and the gap width WGap under the coupling length L of 6 and 7 µm.
    SEM images of the SWG coupler and SNS MRR. (a) SWG coupler. (b) Zoomed-in view of the coupling region of the SNS MRR. (c) SNS MRR.
    Measurement of the SWG coupler and SNS MRR. (a) Schematic of the mid-IR waveguide device testing system. The inset shows the characterization of the tunable mid-IR laser diode. (b) Measured and 3D-FDTD simulated coupling efficiency of the SWG coupler with varying incident angles. (c) Transmission spectrum of the SNS MRR. (d) Q of the SNS MRRs with different coupling lengths L and gap widths WGap. (e) Temperature stability measurement of the SNS MRR.
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    Qiyue Lang, Changguang Zou, Zunyue Zhang, Jiaqi Wang, Kun Liu, Junfeng Jiang, Tiegen Liu, Zhenzhou Cheng, "Mid-infrared suspended silicon nanomembrane microring resonators with grating couplers," Chin. Opt. Lett. 23, 101302 (2025)

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    Paper Information

    Category: Integrated Optics

    Received: Apr. 7, 2025

    Accepted: May. 30, 2025

    Posted: May. 30, 2025

    Published Online: Sep. 9, 2025

    The Author Email: Zunyue Zhang (zyzhang2023@tju.edu.cn), Jiaqi Wang (jqwang@szu.edu.cn), Zhenzhou Cheng (zhenzhoucheng@tju.edu.cn)

    DOI:10.3788/COL202523.101302

    CSTR:32184.14.COL202523.101302

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