Opto-Electronic Engineering, Volume. 38, Issue 9, 50(2011)

Sliding Mode Control of Macro-micro System for Wafer Stage of Lithography

WU Zhi-peng*, CHEN Xing-lin, and LIU Chuan
Author Affiliations
  • [in Chinese]
  • show less
    References(11)

    [1] [1] Heertjes M,Pastink E,Wouw N,et al. Experimental Frequency-Domain Analysis of Nonlinear Controlled Optical Storage Drives [J]. IEEE Trans. Contr. Syst. Technol(S1063-6536),2006,14: 389-397.

    [2] [2] Tan K K,Lee T H,Zhou H X. Micro-positioning of linear-piezoelectric motor based on a learning nonlinear PID controller [J]. IEEE Trans. Mechatron(S1083-4435),2001,6: 428-436.

    [3] [3] Kim J H,Kim M S,Oh M T. Design of the ultra precision stage for lithography using VCM [J]. Proc. of SPIE(S0277-786X),2008,6794: 67941P1-67941P6.

    [4] [4] Schroeck S J,Messner W C. On compensator design for linear time-invariant dual-input single-output system [J]. IEEE Trans. on Magnetics(S1083-4435),2001,6(1): 50-57.

    [5] [5] Heertjes M F,Schuurbiers X G P,Nijmeijer H. Performance-improved design of N-PID controlled motion systems with applications to wafer stages [J]. IEEE Trans. Ind. Electron(S0278-0046),2009,56(5): 1347-1355.

    [7] [7] Lee S H. Optimal Sliding Mode Dual-Stage Actuator Control in Computer Disk Drivest [J]. ASME J. Dyn. Sys., Meas., Control(S0022-0434),2010,132: 041003-1-041003-9.

    [8] [8] Herrmann G,Edwards C,Hredzak B,et al. Application of a discrete sliding mode technique to a HDD dual-stage track-seek and track-following servo system [C]// 2007 IEEE Multi-Conference on Systems and Control,Suntec Convention Center, Singapore,October 1-3,2007: 283-288.

    [9] [9] Wu W C,Liu T S. Frequency-shaped sliding mode control for flying height of pickup head in near-field optical disk drives [J]. IEEE Trans. Magnetics(S1083-4435),2005,41(2): 1061-1063.

    [10] [10] Moura J T,Roy R G,Olagc N. Frequency-Shaped Sliding Modes: Analysis and Experiments [J]. IEEE Trans. Contr. Syst. Technol(S1063-6536),1997,5(4): 394-401.

    [11] [11] Lee S U,Chang P H,Kim S T. Time Delay Control with Switching Action using Frequency-Shaped Integral Sliding Surface [C]// American Control Conference,The Adams Mark Hotel,Denver,Colorado,June 4-6,2003: 202-207.

    [12] [12] Sun Z G,Cheung N C,Zhao SW,et al. Integral Sliding Mode Control with Integral Switching Gain for Magnetic Levitation Apparatus [C]// 3rd International Conference on Power Electronics Systems and Applications,Hong Kong Polytechnic University,Hong Kong,May 20-22,2009: 1-5.

    Tools

    Get Citation

    Copy Citation Text

    WU Zhi-peng, CHEN Xing-lin, LIU Chuan. Sliding Mode Control of Macro-micro System for Wafer Stage of Lithography[J]. Opto-Electronic Engineering, 2011, 38(9): 50

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: May. 25, 2011

    Accepted: --

    Published Online: Sep. 27, 2011

    The Author Email: Zhi-peng WU (elva_w@yahoo.com.cn)

    DOI:10.3969/j.issn.1003-501x.2011.09.010

    Topics