Opto-Electronic Engineering, Volume. 38, Issue 9, 50(2011)
Sliding Mode Control of Macro-micro System for Wafer Stage of Lithography
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WU Zhi-peng, CHEN Xing-lin, LIU Chuan. Sliding Mode Control of Macro-micro System for Wafer Stage of Lithography[J]. Opto-Electronic Engineering, 2011, 38(9): 50
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Received: May. 25, 2011
Accepted: --
Published Online: Sep. 27, 2011
The Author Email: Zhi-peng WU (elva_w@yahoo.com.cn)
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