Chinese Journal of Lasers, Volume. 40, Issue 10, 1008007(2013)

Principal and Error Analysis on Measurement of Multiple-Surface Interference with Wavelength-Tuning Phase-Shifting

Liu Yong*, Liu Xu, Ren Huan, Jiang Hongzhen, Yang Yi, and Ma Hua
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    References(10)

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    [2] [2] K Okada, H Sakuta, T Ose, et al.. Separate measurements of surface shapes and refractive index inhomogeneity of an optical element using tunable-source phase shifting interferometry[J]. Appl Opt, 1990, 29( 22): 3280-3285.

    [3] [3] L L Deck. Multiple surface phase shifting interferometry[C]. SPIE, 2001, 4451: 424-431.

    [4] [4] L L Deck. Fourier-tranform phase-shifting interferometry[J]. Appl Opt, 2003, 42(13): 2354-2365.

    [8] [8] Guo Renhui, Li Jianxin, Zhu Rihong, et al.. Research on the randomly phase shifting algorithm with wavelength tuning[J]. Chinese J Lasers, 2012, 39(5): 0508002.

    [10] [10] J Harris. On the use of windows for harmonic analysis with the discrete Fourier transform[J]. Proceeding of the IEEE, 1978, 66(1): 51-83.

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    Liu Yong, Liu Xu, Ren Huan, Jiang Hongzhen, Yang Yi, Ma Hua. Principal and Error Analysis on Measurement of Multiple-Surface Interference with Wavelength-Tuning Phase-Shifting[J]. Chinese Journal of Lasers, 2013, 40(10): 1008007

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    Paper Information

    Category: measurement and metrology

    Received: Apr. 19, 2013

    Accepted: --

    Published Online: Sep. 6, 2013

    The Author Email: Liu Yong (liuyong-2009@qq.com)

    DOI:10.3788/cjl201340.1008007

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