Chinese Journal of Lasers, Volume. 40, Issue 10, 1008007(2013)

Principal and Error Analysis on Measurement of Multiple-Surface Interference with Wavelength-Tuning Phase-Shifting

Liu Yong*, Liu Xu, Ren Huan, Jiang Hongzhen, Yang Yi, and Ma Hua
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    Liu Yong, Liu Xu, Ren Huan, Jiang Hongzhen, Yang Yi, Ma Hua. Principal and Error Analysis on Measurement of Multiple-Surface Interference with Wavelength-Tuning Phase-Shifting[J]. Chinese Journal of Lasers, 2013, 40(10): 1008007

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    Paper Information

    Category: measurement and metrology

    Received: Apr. 19, 2013

    Accepted: --

    Published Online: Sep. 6, 2013

    The Author Email: Yong Liu (liuyong-2009@qq.com)

    DOI:10.3788/cjl201340.1008007

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