Journal of Synthetic Crystals, Volume. 54, Issue 5, 784(2025)

Growth and Performance of Low-Dislocation 6-Inch GaSb Single Crystal

Wenwen YANG, Wei LU, Hui XIE, Gang LIU, Xinyu LYU, Yihan BAI, Chenhui LI, Jiaoqing PAN, Youwen ZHAO, and Guiying SHEN*
Author Affiliations
  • Laboratory of Solid-State Optoelectronic Information Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing100083, China
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    Figures & Tables(8)
    Schematic diagram of the GaSb single crystal growth system structure
    Photos of 6-inch Te-GaSb single crystal (a) and wafer (b)
    Simulation results of thermal field characteristics for 6-inch GaSb growth. (a) Temperature distribution and heat flux direction in the crystallization zone; (b) variation of the solid-liquid interface deflection Y with the radial position X of the crystal under different growth lengths
    Distribution of melt plane velocity Vx-Vy and flow patterns for growth diameters of 3-inch (a) and 6-inch (b)
    Variation of the solid-liquid interface deflection Y with the radial position X of the crystal under different pulling rates (a) and crystal rotation rates (b), as well as the melt convection at crystal rotation rates of 2 r/min (c) and 6 r/min (d)
    Distribution of dislocation etch pit density (a) and (400) plane rocking curve (b) for 6-inch Te-GaSb single crystal
    Distribution of oxide layer thickness (a) and roughness (b) on the surface of 6-inch Te-GaSb (100) wafer
    • Table 1. Physical properties of the materials used in simulation

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      Table 1. Physical properties of the materials used in simulation

      MaterialPhysical propertyValue
      GaSb meltMelting temperature/K985
      Density/(kgm-35 720
      Heat conductivity/(Wm-1K-117.1
      Specific heat/(J∙K-1∙kg-1328
      Dynamic viscosity/(Pas)2.31×10-3
      Emissivity0.6
      Latent heat/(Jkg-12.606×105
      GaSb crystalHeat conductivity/(Wm-1K-14.57
      Density/(kgm-35 630
      Emissivity0.6
      Specific heat/(J∙K-1∙kg-1266
      GraphiteHeat conductivity/(Wm-1K-158
      Density/(kgm-32 230
      Emissivity0.7
      Specific heat/(J∙K-1∙kg-1720
      SteelHeat conductivity/(Wm-1K-110
      Density/(kgm-37 850
      Emissivity0.5
      Specific heat/(J∙K-1∙kg-1500
      FeltHeat conductivity/(Wm-1K-10.16
      Density/(kgm-3120
      Emissivity0.7
      Specific heat/(J∙K-1∙kg-1200
      QuartzHeat conductivity/(Wm-1K-12
      Density/(kgm-32 650
      Emissivity0.85
      Specific heat/(J∙K-1∙kg-11 232
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    Wenwen YANG, Wei LU, Hui XIE, Gang LIU, Xinyu LYU, Yihan BAI, Chenhui LI, Jiaoqing PAN, Youwen ZHAO, Guiying SHEN. Growth and Performance of Low-Dislocation 6-Inch GaSb Single Crystal[J]. Journal of Synthetic Crystals, 2025, 54(5): 784

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    Paper Information

    Category:

    Received: Nov. 6, 2024

    Accepted: --

    Published Online: Jul. 2, 2025

    The Author Email: Guiying SHEN (shenguiying@semi.ac.cn)

    DOI:10.16553/j.cnki.issn1000-985x.2024.0277

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