Journal of Synthetic Crystals, Volume. 54, Issue 5, 784(2025)
Growth and Performance of Low-Dislocation 6-Inch GaSb Single Crystal
Fig. 1. Schematic diagram of the GaSb single crystal growth system structure
Fig. 3. Simulation results of thermal field characteristics for 6-inch GaSb growth. (a) Temperature distribution and heat flux direction in the crystallization zone; (b) variation of the solid-liquid interface deflection Y with the radial position X of the crystal under different growth lengths
Fig. 4. Distribution of melt plane velocity Vx-Vy and flow patterns for growth diameters of 3-inch (a) and 6-inch (b)
Fig. 5. Variation of the solid-liquid interface deflection Y with the radial position X of the crystal under different pulling rates (a) and crystal rotation rates (b), as well as the melt convection at crystal rotation rates of 2 r/min (c) and 6 r/min (d)
Fig. 6. Distribution of dislocation etch pit density (a) and (400) plane rocking curve (b) for 6-inch Te-GaSb single crystal
Fig. 7. Distribution of oxide layer thickness (a) and roughness (b) on the surface of 6-inch Te-GaSb (100) wafer
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Wenwen YANG, Wei LU, Hui XIE, Gang LIU, Xinyu LYU, Yihan BAI, Chenhui LI, Jiaoqing PAN, Youwen ZHAO, Guiying SHEN. Growth and Performance of Low-Dislocation 6-Inch GaSb Single Crystal[J]. Journal of Synthetic Crystals, 2025, 54(5): 784
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Received: Nov. 6, 2024
Accepted: --
Published Online: Jul. 2, 2025
The Author Email: Guiying SHEN (shenguiying@semi.ac.cn)