Infrared and Laser Engineering, Volume. 51, Issue 7, 20210688(2022)

Preparation method of silicon-based aspheric cylindrical microlens array

Changda Zhang1,2, Mingyou Gao1, Yan Zhou3, Xiaozhou Deng1, Xin Xiong1, Fenglei Liu1, and Weiguo Zhang1、*
Author Affiliations
  • 1Research Center for Micro-Nano Manufacturing and System Integration, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China
  • 2School of Information Science and Engineering, Chongqing Jiaotong University, Chongqing 400074, China
  • 3Tianjin Jinhang Institute of Technical Physics, Tianjin 300308, China
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    Figures & Tables(11)
    Silicon lens preparation process
    Influence of spin-coating speed on photoresist thickness and surface uniformity of adhesive layer
    Comparison of bubble defects on the lens surface after etching. (a) 90 ℃ constant temperature baking for single coating; (b) 22-90 ℃ gradient baking for single coating; (c) 22-90 ℃ gradient baking for secondary coating
    Photoresist coating experiment for multiple times
    Mask pattern size
    Surface topography after photolithography. (a) One moving exposure; (b) Cycle moving exposure
    Mask layout correction principle
    Surface morphology of Si etched by different CHF3 flow rates. (a) 20 sccm; (b) 30 sccm; (c) 40 sccm; (d) 40 sccm cyclic etching
    Influence of different CHF3 gas flow rate on the etching speed of silicon and photoresist
    Comparison of surface roughness of silicon lens. (a) Single etching; (b) Cyclic etching
    Large numerical aperture aspheric silicon micro cylindrical lens. (a) Real image of lens; (b) AFM; (c)-(d) SEM surface morphology; (e) Fitting diagram of effective caliber curve
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    Changda Zhang, Mingyou Gao, Yan Zhou, Xiaozhou Deng, Xin Xiong, Fenglei Liu, Weiguo Zhang. Preparation method of silicon-based aspheric cylindrical microlens array[J]. Infrared and Laser Engineering, 2022, 51(7): 20210688

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    Paper Information

    Category: Optical fabrication

    Received: Sep. 17, 2021

    Accepted: --

    Published Online: Dec. 20, 2022

    The Author Email:

    DOI:10.3788/IRLA20210688

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