Chinese Journal of Lasers, Volume. 43, Issue 10, 1003001(2016)

Influence of Oxygenating Port Position on Properties of HfO2 Films Deposited by Electron Beam Evaporation

Zheng Ruxi1,2、*, Yi Kui1, Fan Zhengxiu1, Shao Jianda1, and Tu Feifei1,2
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    References(9)

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    [5] [5] Kruschwitz J D T, Pawlewicz W T. Optical and durability properties of infrared transmitting thin films[J]. Applied Optics, 1997, 36(10): 2157-2159.

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    [2] Shan Chong, Zhao Yuan′an, Zhang Xihe, Hu Guohang, Wang Yueliang, Peng Xiaocong, Li Cheng. Study on Laser Damage Threshold of Optical Element Surface Based on Gaussian Pulsed Laser Spatial Resolution[J]. Chinese Journal of Lasers, 2018, 45(1): 104002

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    Zheng Ruxi, Yi Kui, Fan Zhengxiu, Shao Jianda, Tu Feifei. Influence of Oxygenating Port Position on Properties of HfO2 Films Deposited by Electron Beam Evaporation[J]. Chinese Journal of Lasers, 2016, 43(10): 1003001

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    Paper Information

    Category: materials and thin films

    Received: Apr. 18, 2016

    Accepted: --

    Published Online: Oct. 12, 2016

    The Author Email: Ruxi Zheng (rxzheng@siom.ac.cn)

    DOI:10.3788/cjl201643.1003001

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