[1] RAHIM A, SPUESENS T, BAETS R et al. Open-access silicon photonics: current status and emerging initiatives[J]. Institute of Electrical and Electronics Engineers, 106, 2313-2330(2018).

[2] HONG Shihan, ZHANG Long, WANG Yi et al. Ultralow-loss compact silicon photonic waveguide spirals and delay lines[J]. Photonics Research, 10, 1-7(2022).

[3] SU Yikai, ZHANG Yong, QIU Ciyuan et al. Silicon photonic platform for passive waveguide devices: materials, fabrication, and applications[J]. Advanced Materials Technologies, 5, 1901153(2020).

[4] ZHANG Shuangyou, BI T, HARDER I et al. Low-temperature sputtered ultralow-loss silicon nitride for hybrid photonic integration[J]. Laser & Photonics Reviews, 18, 2300642(2023).

[5] BOLLER K J, VAN REES A, FAN Y et al. Hybrid integrated semiconductor lasers with silicon nitride feedback circuits[J]. Photonics, 7, 4(2020).

[6] GIL-MOLINA A, WESTREICH O, ANTMAN Y et al. Robust hybrid III-V/Si3N4 laser with kHz-linewidth and GHz-pulling range[C], 1-2(2020).

[7] FENG Changkun, LIU Danni, NI Peiren et al. Suppression of back-reflection from the end face of Si3N4 waveguide resonator[C], 9, 28897-28903(2021).

[8] HUANG Ying, SONG Junfeng, LUO Xianshu et al. CMOS-compatible monolithic multi-layer Si3N4-on-SOI platform for low-loss high-performance silicon photonics dense integration[J]. Optics Express, 22, 21859-21865(2014).

[9] KRÜCKEL C J, FÜLÖP A, KLINTBERG T et al. Linear and nonlinear characterization of low-stress high-confinement silicon-rich nitride waveguides[J]. Optics Express, 23, 7443-7444(2015).

[10] JIANG Wanli, XU Dehui, YAO Shaokang et al. Effect of hyperthermal annealing on LPCVD silicon nitride[J]. Materials Science in Semiconductor Processing, 43, 222-229(2016).

[11] LI Bin, LI Donghao, TANG Bo et al. Towards monolithic low-loss silicon nitride waveguides on a mature 200 mm CMOS platform[J]. Optik, 250, 168309(2022).

[12] XUAN Yi, LIU Yang, VARGHESE L T et al. High-Q silicon nitride microresonators exhibiting low-power frequency comb initiation[J]. Optica, 3, 1171-1180(2016).

[13] EPPING J P, HOEKMAN M, MATEMAN R et al. High confinement, high yield Si3N4 waveguides for nonlinear optical applications[J]. Optics Express, 23, 642-648(2015).

[14] LIU Junqiu, HUANG Guanhao, WANG Ruining et al. High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits[J]. Nature Communications, 12, 2236(2021).

[15] DE OLIVEIRA E C, GEROSA R M, PHELAN C et al. Fabrication and characterization of silicon nitride waveguides for mid-infrared applications[C], 1-4(2019).

[16] SHANG Kuan, PATHAK S, GUAN Binbin et al. Low-loss compact multilayer silicon nitride platform for 3D photonic integrated circuits[J]. Optics Express, 23, 21334-21342(2015).

[17] MUÑOZ P, DOMÉNECH J, DOMÍNGUEZ C et al. State of the art of silicon nitride photonics integration platforms[C], 1-4(2017).

[18] PFEIFFER M H P, HERKOMMER C, LIU Junqiu et al. Photonic damascene process for low-loss, high-confinement silicon nitride waveguides[J]. Institute of Electrical and Electronics Engineers Journal of Selected Topics in Quantum Electronics, 24, 1-11(2018).

[19] MAO S C, TAO S H, XU Y L et al. Low propagation loss Si3N4 optical waveguide prepared by optimal low-hydrogen module[J]. Optics Express, 16, 20809-20816(2008).

[20] WANG Linghua, XIE Weiqiang, VAN THOURHOUT D et al. Nonlinear silicon nitride waveguides based on a PECVD deposition platform[J]. Optics Express, 26, 9645-9654(2018).