Fig. 1. Designed reflectivity profiles of aperiodic Pd/B4C multilayers operating in the 8.5–10.5 nm waveband with different desired reflectivities.

Fig. 2. Designed reflectivity profiles of aperiodic Pd/B4C multilayers operating from 8.5 to 10.5 nm with a different number of bilayers.

Fig. 3. Reflectivity profile of the aperiodic Pd/B4C multilayer optimized with no interface width (solid), adding 0.6 nm interface width after optimization (dash), and optimized with the fixed interface width of 0.6 nm (dash dot).

Fig. 4. Reflectivity profile of the original aperiodic multilayer optimized with 100% bulk density (solid), the original multilayer calculated with 95% (dash) and 90% bulk density (dash dot), and the multilayer optimized with 90% bulk density (dot).

Fig. 5. Reflectivity profiles of the designed aperiodic multilayer with different layer thickness errors. The multilayer is designed for the waveband of 8.5–10.5 nm.

Fig. 6. Layer thickness distribution of the multilayer designed for the waveband of 8.5–10.5 nm (solid) with 120 bilayers, and the multilayer with random errors of ≤±2% (open).

Fig. 7. Reflectivity profiles of the periodic Pd/B4C multilayer and aperiodic multilayers designed for different bandwidths.