Design of Pd/B<sub>4</sub>C aperiodic multilayers for 8–12  nm region with flat reflectivity profile

Yiwen Wang; Qiushi Huang; Qiang Yi; Li Jiang; Zhong Zhang; Zhanshan Wang

doi:10.3788/COL201614.073101

Chinese Optics Letters, Volume. 14, Issue 7, 073101(2016)

Design of Pd/B₄C aperiodic multilayers for 8–12 nm region with flat reflectivity profile

Yiwen Wang¹, Qiushi Huang¹, Qiang Yi^1,2, Li Jiang¹, Zhong Zhang¹, and Zhanshan Wang^1、*

¹Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China

²Institute of Nuclear Physics and Chemistry CAEP, Mianyang 621900, China

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Yiwen Wang, Qiushi Huang, Qiang Yi, Li Jiang, Zhong Zhang, Zhanshan Wang, "Design of Pd/B₄C aperiodic multilayers for 8–12 nm region with flat reflectivity profile," Chin. Opt. Lett. 14, 073101 (2016)

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Paper Information

Category: Thin films

Received: Feb. 4, 2016

Accepted: May. 16, 2016

Published Online: Aug. 3, 2018

The Author Email: Zhanshan Wang (wangzs@tongji.edu.cn)

DOI:10.3788/COL201614.073101

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology