Analysis of Zero Position Error Influencing on Control Algorithm for Fabricating Mesh on the Concave Spherical Substrate by Photolithography Technology

LIANG Feng-chao

Opto-Electronic Engineering, Volume. 35, Issue 12, 122(2008)

LIANG Feng-chao^*

Author Affiliations

[in Chinese]

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References(2)

[2] [2] Maiden A,McWilliam R,Purvis A,et al.Nonplanar photolithography with computer-generated holograms[J].Optics Letters,2005,30(11):1300-1301

[6] [6] LIANG Fengchao,HU Jun.Key techniques of laser direct writing of fine lines on the spherical surface[J].SPIE,2006,6034:60340G-1-60340G-7

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LIANG Feng-chao. Analysis of Zero Position Error Influencing on Control Algorithm for Fabricating Mesh on the Concave Spherical Substrate by Photolithography Technology[J]. Opto-Electronic Engineering, 2008, 35(12): 122

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Paper Information

Category:

Received: Jun. 5, 2008

Accepted: --

Published Online: Mar. 1, 2010

The Author Email: Feng-chao LIANG (liangxfile@yahoo.com.cn)

DOI:

CSTR:32186.14.

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology