Opto-Electronic Engineering, Volume. 35, Issue 12, 122(2008)
Analysis of Zero Position Error Influencing on Control Algorithm for Fabricating Mesh on the Concave Spherical Substrate by Photolithography Technology
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LIANG Feng-chao. Analysis of Zero Position Error Influencing on Control Algorithm for Fabricating Mesh on the Concave Spherical Substrate by Photolithography Technology[J]. Opto-Electronic Engineering, 2008, 35(12): 122
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Received: Jun. 5, 2008
Accepted: --
Published Online: Mar. 1, 2010
The Author Email: Feng-chao LIANG (liangxfile@yahoo.com.cn)
CSTR:32186.14.