Piezoelectrics & Acoustooptics, Volume. 46, Issue 3, 296(2024)

The Study of Based on Back Cavity Etching and Lateral Exciting Film Bulk Acoustic Resonator

XU Yang1,2, SI Meiju1,2, WU Gaomi2,3, LIU Wenyi1,2, GONG Lele2,3, ZHEN Jingyi1,2, YU Qi2,3, and CHEN Jinlin1,2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    References(6)

    [1] [1] HASSAN M E, MOREIRA C P, SHIRAKAWA A A, et al.A multistandard RF receiver front-end usingarecon-figurable FBAR filter[C]∥[S.l.]: IEEE North-east Workshop on Circuits & Systems, IEEE, 2006.

    [2] [2] HE Jie, MA Jinyi, HU Shaoqin,et al.Development of SAW devices on LN/LT-POI multilayered structure[J].Piezoelectrics & Acoustooptics, 2020,42(6):864-870.

    [3] [3] SOUMYA Y, VICTOR P, JULIUS K, et al.Analysis of XBAR resonance and higher order spurious modes[C]∥Glasgow,England: IEEE International Ultrasonics Symposium(IUS), 2019.

    [4] [4] DU Rufan, TIAN Yahui, ZHANG Qiaozhen, et al.Study on properties of LN single crystal thin film XBAR for RF filters[J].Piezoelectrics & Acoustooptics, 2022,44(5):678-681.

    [5] [5] PLESSKY V,YANDRAPALLI S,TURNER P J, et al.5 GHz laterally-excited bulk-wave resonators(XBARs) based on thin platelets of lithium niobate[J].Electronics Letters,2019,55(2):98-100.

    [6] [6] YU Xiaoquan,HE Jie, MA Jinyi.Recent advances and prospects of Lamb wave devices based on piezo-MEMS[J].Piezoelectrics & Acoustooptics, 2022,44(2):223-229.

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    XU Yang, SI Meiju, WU Gaomi, LIU Wenyi, GONG Lele, ZHEN Jingyi, YU Qi, CHEN Jinlin. The Study of Based on Back Cavity Etching and Lateral Exciting Film Bulk Acoustic Resonator[J]. Piezoelectrics & Acoustooptics, 2024, 46(3): 296

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    Paper Information

    Received: Apr. 7, 2024

    Accepted: --

    Published Online: Aug. 29, 2024

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2024.03.003

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