Piezoelectrics & Acoustooptics, Volume. 46, Issue 3, 296(2024)
The Study of Based on Back Cavity Etching and Lateral Exciting Film Bulk Acoustic Resonator
[1] [1] HASSAN M E, MOREIRA C P, SHIRAKAWA A A, et al.A multistandard RF receiver front-end usingarecon-figurable FBAR filter[C]∥[S.l.]: IEEE North-east Workshop on Circuits & Systems, IEEE, 2006.
[2] [2] HE Jie, MA Jinyi, HU Shaoqin,et al.Development of SAW devices on LN/LT-POI multilayered structure[J].Piezoelectrics & Acoustooptics, 2020,42(6):864-870.
[3] [3] SOUMYA Y, VICTOR P, JULIUS K, et al.Analysis of XBAR resonance and higher order spurious modes[C]∥Glasgow,England: IEEE International Ultrasonics Symposium(IUS), 2019.
[4] [4] DU Rufan, TIAN Yahui, ZHANG Qiaozhen, et al.Study on properties of LN single crystal thin film XBAR for RF filters[J].Piezoelectrics & Acoustooptics, 2022,44(5):678-681.
[5] [5] PLESSKY V,YANDRAPALLI S,TURNER P J, et al.5 GHz laterally-excited bulk-wave resonators(XBARs) based on thin platelets of lithium niobate[J].Electronics Letters,2019,55(2):98-100.
[6] [6] YU Xiaoquan,HE Jie, MA Jinyi.Recent advances and prospects of Lamb wave devices based on piezo-MEMS[J].Piezoelectrics & Acoustooptics, 2022,44(2):223-229.
Get Citation
Copy Citation Text
XU Yang, SI Meiju, WU Gaomi, LIU Wenyi, GONG Lele, ZHEN Jingyi, YU Qi, CHEN Jinlin. The Study of Based on Back Cavity Etching and Lateral Exciting Film Bulk Acoustic Resonator[J]. Piezoelectrics & Acoustooptics, 2024, 46(3): 296
Received: Apr. 7, 2024
Accepted: --
Published Online: Aug. 29, 2024
The Author Email: