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Piezoelectrics & Acoustooptics, Volume. 46, Issue 3, 296(2024)

The Study of Based on Back Cavity Etching and Lateral Exciting Film Bulk Acoustic Resonator

XU Yang1...2, SI Meiju1,2, WU Gaomi2,3, LIU Wenyi1,2, GONG Lele2,3, ZHEN Jingyi1,2, YU Qi2,3, and CHEN Jinlin12 |Show fewer author(s)
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    XU Yang, SI Meiju, WU Gaomi, LIU Wenyi, GONG Lele, ZHEN Jingyi, YU Qi, CHEN Jinlin. The Study of Based on Back Cavity Etching and Lateral Exciting Film Bulk Acoustic Resonator[J]. Piezoelectrics & Acoustooptics, 2024, 46(3): 296

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    Paper Information

    Received: Apr. 7, 2024

    Accepted: --

    Published Online: Aug. 29, 2024

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2024.03.003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology