Fig. 1. Tedlar composite-aluminum film system

Fig. 2. Electron lattice temperature curves with time and depth. (a) Electronic lattice temperature and time; (b) electronic lattice temperature and depth

Fig. 3. Simulation results of surface temperature change of substrate material under different laser power

Fig. 4. Simulation results of interface temperature change under different laser powers. (a) 3.0 W; (b) 3.5 W; (c) 4.0 W; (d) 4.5 W; (e) 5.0 W; (f) 5.5 W

Fig. 5. Change curve of size of discontinuity point and scanning rate of laser etching

Fig. 6. Influence of spot diameter and spot overlap rate on etching precision. (a) 10 μm; (b) 20 μm; (c) 40 μm; (d) 60 μm

Fig. 7. Micromorphology of surface etching of composite materials under different laser powers. (a) 2.5 W; (b) 3.0 W; (c) 3.5 W; (d) 4.0 W; (e) 4.5 W; (f) 5.0 W

Fig. 8. Surface morphology of composites at different laser scanning rates. (a) 500 mm/s; (b) 550 mm/s; (c) 600 mm/s; (d) 650 mm/s

Fig. 9. Micrograph of etched pattern array elements under optimized process conditions

Fig. 10. Overall effect of Tedlar composite and aluminum film after femtosecond laser etching under optimized process conditions