Finite Element Analysis for Substrate′s Initial Stress in Vacuum Deposition

[in Chinese]; [in Chinese]; [in Chinese]

Chinese Journal of Lasers, Volume. 33, Issue 7, 963(2006)

[in Chinese]^*, [in Chinese], and [in Chinese]

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References(4)

[3] [3] A. K. Sinha, T. T. Sheng. The temperature dependence of stresses in aluminum films on oxidized silicon substrates [J] . Thin Solid Films,1978, 48(1):117～126

[7] [7] B. Mack. Deflection and stress analysis of a 4.2-m diam primary mirror of an altazimuth-mounted telescope [J]. Appl. Opt.,1980, 19(6):1000～1010

[8] [8] Myung K . Cho, Gary Poczulp . Surface distortions of a 3.5-meter mirror subjected to thermal variations [C]. SPIE,1991, 1532:137～146

[11] [11] D. J. Ward, A. F. Williams. Finite element simulation of the development of residual stress in IAPVD films [J]. Thin Solid Films,1999, 355-356:311～315

CLP Journals

[1] Zhu Pei, Zhu Jianqiang. Influences of the Substrate Stress on Element Surface Figure in Vacuum Evaporating Deposition[J]. Chinese Journal of Lasers, 2009, 36(2): 476

[2] [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Effects of Substrate Materials and Deposition Parameters on Film Stress[J]. Acta Optica Sinica, 2010, 30(2): 602

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[in Chinese], [in Chinese], [in Chinese]. Finite Element Analysis for Substrate′s Initial Stress in Vacuum Deposition[J]. Chinese Journal of Lasers, 2006, 33(7): 963

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Paper Information

Category: materials and thin films

Received: Dec. 9, 2005

Accepted: --

Published Online: Aug. 8, 2006

The Author Email: (sunrongge@siom.ac.cn)

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology