Chinese Journal of Lasers, Volume. 33, Issue 7, 963(2006)

Finite Element Analysis for Substrate′s Initial Stress in Vacuum Deposition

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    [in Chinese], [in Chinese], [in Chinese]. Finite Element Analysis for Substrate′s Initial Stress in Vacuum Deposition[J]. Chinese Journal of Lasers, 2006, 33(7): 963

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    Paper Information

    Category: materials and thin films

    Received: Dec. 9, 2005

    Accepted: --

    Published Online: Aug. 8, 2006

    The Author Email: (sunrongge@siom.ac.cn)

    DOI:

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