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Opto-Electronic Engineering, Volume. 48, Issue 5, 200364(2021)

All-silicon PIN photodetector based on black silicon microstructure

Zheng Zeyu1, Luo Qian1, Xu Kaikai1、*, Liu Zhongyuan2, and Zhu Kunfeng3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    Zheng Zeyu, Luo Qian, Xu Kaikai, Liu Zhongyuan, Zhu Kunfeng. All-silicon PIN photodetector based on black silicon microstructure[J]. Opto-Electronic Engineering, 2021, 48(5): 200364

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    Paper Information

    Category: Article

    Received: Oct. 10, 2020

    Accepted: --

    Published Online: Sep. 4, 2021

    The Author Email: Kaikai Xu (kaikaix@uestc.edu.cn)

    DOI:10.12086/oee.2021.200364

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology