Acta Optica Sinica, Volume. 41, Issue 24, 2412003(2021)

Random Error Estimation and Configuration Optimization of Dual-Rotating Compensator-Mueller Matrix Ellipsometer Calibration Experiments

Zhengwei Miao1,2,3, Yuanyuan Tang1,2、*, Kai Wei1,2, and Yudong Zhang1,2
Author Affiliations
  • 1Key Laboratory of Adaptive Optics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
  • 2Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
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    References(20)

    [1] Li J Q, Yan J F, Li X et al. Research advancement on ultrafast laser microprocessing of transparent dielectrics[J]. Chinese Journal of Lasers, 48, 0202019(2021).

    [2] Luo S, Wang J Q, Zhang B. Influence offatigue characteristics of piezoelectric ceramics actuators on correction ability of deformable mirror[J]. Chinese Journal of Lasers, 45, 0905002(2018).

    [3] Shi Y J, Zhang Z H. Linearly polarized photoacoustic imaging based on anisotropic optical absorption[J]. Chinese Journal of Lasers, 46, 0807001(2019).

    [4] Fujiwara H. Spectrosco picellipsometry[M]. Chichester: John Wiley & Sons(2007).

    [6] Gu H G, Chen X G, Jiang H et al. Optimal broadband Mueller matrix ellipsometer using multi-waveplates with flexibly oriented axes[J]. Journal of Optics, 18, 025702(2016).

    [7] Song G Z, Liu T, Chen Y Q et al. Calibration of spectroscopic ellipsometer using multiple standard samples[J]. Acta Optica Sinica, 34, 0312003(2014).

    [8] Li S F. Jones-matrix analysis with Pauli matrices: application to ellipsometry[J]. Journal of the Optical Society of America A, 17, 920-926(2000).

    [9] Gu H G, Liu S Y, Chen X G et al. Calibration of misalignment errors in composite waveplates using Mueller matrix ellipsometry[J]. Applied Optics, 54, 684-693(2015).

    [10] Li W Q, Zhang C W, Jiang H et al. Depolarization artifacts in dual rotating-compensator Mueller matrix ellipsometry[J]. Journal of Optics, 18, 055701(2016).

    [11] Fan Z T, Tang Y Y, Wei K et al. Calibration of focusing lens artifacts in a dual rotating-compensator Mueller matrix ellipsometer[J]. Applied Optics, 57, 4145-4152(2018).

    [12] Fan Z T. Research on the advanced parameters problem of Mueller matrix ellipsometry system Chengdu: Institute of Optics and Electronics,[D]. Chinese Academy of Sciences(2019).

    [13] Fan Z T, Tang Y Y, Wei K et al. Measurement of polarization correlation coefficients of light source and spectrometer in spectroscopic ellipsometry[J]. Opto-Electronic Engineering, 46, 180507(2019).

    [14] Vap J C, Nauyoks S E, Marciniak M A. Optimization of a dual-rotating-retarder polarimeter as applied to a tunable infrared Mueller-matrix scatterometer[J]. Measurement Science and Technology, 24, 055901(2013).

    [15] Goldstein D H, Chipman R A. Error analysis of a Mueller matrix polarimeter[J]. Journal of the Optical Society of America A, 7, 693-700(1990).

    [16] Losurdo M, Hingerl K. Ellipsometry at the nanoscale[M]. Heidelberg: Springer(2013).

    [17] Cheng X, Li M, Zhou J et al. Error analysis of the calibration of a dual-rotating-retarder Mueller matrix polarimeter[J]. Applied Optics, 56, 7067-7074(2017).

    [19] Wang W S, Ning T G, Pei L et al. Gainequalization of few-mode fiber amplifier based on genetic algorithm[J]. Acta Optica Sinica, 41, 0906001(2021).

    [20] Vose M D[M]. The simple genetic algorithm: foundations and theory(1999).

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    Zhengwei Miao, Yuanyuan Tang, Kai Wei, Yudong Zhang. Random Error Estimation and Configuration Optimization of Dual-Rotating Compensator-Mueller Matrix Ellipsometer Calibration Experiments[J]. Acta Optica Sinica, 2021, 41(24): 2412003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 26, 2021

    Accepted: Jul. 4, 2021

    Published Online: Nov. 30, 2021

    The Author Email: Tang Yuanyuan (yytang001@126.com)

    DOI:10.3788/AOS202141.2412003

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