Random Error Estimation and Configuration Optimization of Dual-Rotating Compensator-Mueller Matrix Ellipsometer Calibration Experiments

Zhengwei Miao; Yuanyuan Tang; Kai Wei; Yudong Zhang

doi:10.3788/AOS202141.2412003

Acta Optica Sinica, Volume. 41, Issue 24, 2412003(2021)

Random Error Estimation and Configuration Optimization of Dual-Rotating Compensator-Mueller Matrix Ellipsometer Calibration Experiments

Zhengwei Miao^1,2,3, Yuanyuan Tang^1,2、*, Kai Wei^1,2, and Yudong Zhang^1,2

Author Affiliations

¹Key Laboratory of Adaptive Optics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China

²Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China

³University of Chinese Academy of Sciences, Beijing 100049, China

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Zhengwei Miao, Yuanyuan Tang, Kai Wei, Yudong Zhang. Random Error Estimation and Configuration Optimization of Dual-Rotating Compensator-Mueller Matrix Ellipsometer Calibration Experiments[J]. Acta Optica Sinica, 2021, 41(24): 2412003

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: May. 26, 2021

Accepted: Jul. 4, 2021

Published Online: Nov. 30, 2021

The Author Email: Tang Yuanyuan (yytang001@126.com)

DOI:10.3788/AOS202141.2412003

Topics

laser devices and laser physics

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Instrumentation, Measurement and Metrology