Journal of Infrared and Millimeter Waves, Volume. 39, Issue 1, 56(2020)
A 3.0 THz detector based on plasma-wave theory proposed by Dyakonov and Shur was designed and fabricated in 65 nm standard CMOS process, the detector consists of a patch antenna, a NMOS field effect transistor, a matching network, and a notch filter. The detector can achieve a room-temperature responsivity (Rv) of 526 V/W and a noise equivalent power (NEP) of 73 pW/Hz1/2. The terahertz scanning imaging system was built with the detector and stepper motor, and the far-field shape of the terahertz source beam was obtained, the full width at half maximum (FWHM) of the beam is 240 μm; and the image of the polyformaldehyde toothpick and tree leaf were obtained through the scanning imaging system, it shows that CMOS terahertz detectors have potential applications in the imaging field.
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Tong FANG, Li-Yuan LIU, Zhao-Yang LIU, Peng FENG, Yuan-Yuan LI, Jun-Qi LIU, Jian LIU, Nan-Jian WU.
Category: Millimeter Wave and Terahertz Technology
Received: May. 8, 2019
Accepted: --
Published Online: Mar. 12, 2020
The Author Email: Li-Yuan LIU (liuly@semi.ac.cn)