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Journal of Synthetic Crystals, Volume. 54, Issue 2, 227(2025)

Homoepitaxial Growth of Gallium Oxide Thick Films by HVPE Method

DONG Zengyin1,2, WANG Yingmin1、*, ZHANG Song1, LI He1, SUN Kewei1, CHENG Hongjuan1, and LIU Chao2
Author Affiliations
  • 1The 46th Research Institute, China Electronics Technology Group Corporation, Tianjin 300220, China
  • 2School of Integrated Circuits, Shandong University, Jinan 250100, China
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    DONG Zengyin, WANG Yingmin, ZHANG Song, LI He, SUN Kewei, CHENG Hongjuan, LIU Chao. Homoepitaxial Growth of Gallium Oxide Thick Films by HVPE Method[J]. Journal of Synthetic Crystals, 2025, 54(2): 227

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    Paper Information

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    Received: Oct. 24, 2024

    Accepted: Mar. 31, 2025

    Published Online: Mar. 31, 2025

    The Author Email: WANG Yingmin (wymzll@126.com)

    DOI:10.16553/j.cnki.issn1000-985x.2024.0251

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology