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Chinese Optics Letters, Volume. 7, Issue 2, 02162(2009)

Influences of Y2O3 dopant content on residual stress, structure, and optical properties of ZrO2 thin films

Qiling Xiao, Shuying Shao, Jianda Shao, and Zhengxiu Fan
Author Affiliations
  • R and D Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 2018002 Graduate University of Chinese Academy of Sciences, Beijing 100049
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    Article index updated: Feb. 23, 2023

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    Qiling Xiao, Shuying Shao, Jianda Shao, Zhengxiu Fan, "Influences of Y2O3 dopant content on residual stress, structure, and optical properties of ZrO2 thin films," Chin. Opt. Lett. 7, 02162 (2009)

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    Paper Information

    Received: Apr. 8, 2008

    Accepted: --

    Published Online: Feb. 23, 2009

    The Author Email:

    DOI:10.3788/COL20090702.0162

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology