Chinese Journal of Lasers, Volume. 46, Issue 9, 904006(2019)

Precision Displacement Measurement with Nanometer Resolution Based on Transmissive Laser Air-Wedge Interference

Wang Zixuan... Ji Cong, Wang Jing, Yang Gang, Wang Xiaolong and Lin Qiang |Show fewer author(s)
Author Affiliations
  • Center for Optics and Optoelectronics Research, College of Science, Zhejiang University of Technology, Hangzhou, Zhejiang 310023, China
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    References(14)

    [6] Fu H J, Ji R D, Hu P C et al. Measurement method for nonlinearity in heterodyne laser interferometers based on double-channel quadrature demodulation[J]. Sensors, 18, 2768(2018).

    [11] Ahmad H, Aidit S N, Ooi S I et al. Supercontinuum micrometer-displacement sensor using single-multi-air-gap-single mode fiber as sensing probe[J]. IEEE Sensors Journal, 18, 8275-8279(2018).

    [12] Guan K S, Li Y H, Chen Y Xet al. A novel optical fiber displacement measurement system[J]. Materials, 599/600/601, 684-688(2014).

    [13] Suhadolnik A, Petrisic J. Displacement measurement using optical fiber reflection sensors[J]. Informacije Midem-Journal of Microelectronics Electronic Components and Materials, 32, 186-188(2002).

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    Wang Zixuan, Ji Cong, Wang Jing, Yang Gang, Wang Xiaolong, Lin Qiang. Precision Displacement Measurement with Nanometer Resolution Based on Transmissive Laser Air-Wedge Interference[J]. Chinese Journal of Lasers, 2019, 46(9): 904006

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    Paper Information

    Category: Measurement and metrology

    Received: Apr. 2, 2019

    Accepted: --

    Published Online: Sep. 10, 2019

    The Author Email:

    DOI:10.3788/CJL201946.0904006

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