Precision Displacement Measurement with Nanometer Resolution Based on Transmissive Laser Air-Wedge Interference

Wang Zixuan; Ji Cong; Wang Jing; Yang Gang; Wang Xiaolong; Lin Qiang

doi:10.3788/CJL201946.0904006

Chinese Journal of Lasers, Volume. 46, Issue 9, 904006(2019)

Precision Displacement Measurement with Nanometer Resolution Based on Transmissive Laser Air-Wedge Interference

Wang Zixuan, Ji Cong, Wang Jing, Yang Gang, Wang Xiaolong, and Lin Qiang

Center for Optics and Optoelectronics Research, College of Science, Zhejiang University of Technology, Hangzhou, Zhejiang 310023, China

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Wang Zixuan, Ji Cong, Wang Jing, Yang Gang, Wang Xiaolong, Lin Qiang. Precision Displacement Measurement with Nanometer Resolution Based on Transmissive Laser Air-Wedge Interference[J]. Chinese Journal of Lasers, 2019, 46(9): 904006

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Paper Information

Category: Measurement and metrology

Received: Apr. 2, 2019

Accepted: --

Published Online: Sep. 10, 2019

The Author Email:

DOI:10.3788/CJL201946.0904006

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology