Acta Optica Sinica, Volume. 28, Issue 1, 189(2008)

Methods for Increasing Sidewall Steepness of Reactive Ion-Beam Etched, Sub-Micrometer-Period Gratings

Meng Xiangfeng* and Li Lifeng
Author Affiliations
  • [in Chinese]
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    Meng Xiangfeng, Li Lifeng. Methods for Increasing Sidewall Steepness of Reactive Ion-Beam Etched, Sub-Micrometer-Period Gratings[J]. Acta Optica Sinica, 2008, 28(1): 189

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    Paper Information

    Category: Physical Optics

    Received: May. 30, 2007

    Accepted: --

    Published Online: Jan. 29, 2008

    The Author Email: Xiangfeng Meng (mengxiangfeng00@mails.tsinghua.edu.cn)

    DOI:

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