Acta Optica Sinica, Volume. 28, Issue 1, 189(2008)
Methods for Increasing Sidewall Steepness of Reactive Ion-Beam Etched, Sub-Micrometer-Period Gratings
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Meng Xiangfeng, Li Lifeng. Methods for Increasing Sidewall Steepness of Reactive Ion-Beam Etched, Sub-Micrometer-Period Gratings[J]. Acta Optica Sinica, 2008, 28(1): 189
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