[1] Aydin E, Allen T G, de Bastiani M et al. Interplay between temperature and bandgap energies on the outdoor performance of perovskite/silicon tandem solar cells[J]. Nature Energy, 5, 851-859(2020).

[2] Wang C H, Li X S, Hu H J et al. Monitoring of the central blood pressure waveform via a conformal ultrasonic device[J]. Nature Biomedical Engineering, 2, 687-695(2018).

[3] Deng Z Y, Jia Q, Feng B et al. Research progress on fabrication and applications of high-performance films by pulsed laser deposition[J]. Chinese Journal of Lasers, 48, 0802010(2021).

[4] Park K K, Lee H, Kupnik M et al. Fabrication of capacitive micromachined ultrasonic transducers via local oxidation and direct wafer bonding[J]. Journal of Microelectromechanical Systems, 20, 95-103(2011).

[5] Wei M Y, Lian J, Jiang Q F et al. Ellipsometry study on optical properties of two-dimensional platinum selenide film[J]. Chinese Journal of Lasers, 48, 1203002(2021).

[6] Youngquist R C, Carr S, Davies D E. Optical coherence-domain reflectometry: a new optical evaluation technique[J]. Optics Letters, 12, 158-160(1987).

[7] Kim S W, Kim G H. Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry[J]. Applied Optics, 38, 5968-5973(1999).

[8] Jellison G E. Examination of thin SiO2 films on Si using spectroscopic polarization modulation ellipsometry[J]. Journal of Applied Physics, 69, 7627-7634(1991).

[9] Yun Y H, Joo K N. Novel combined measurement system to characterize film structures by spectral interferometry and ellipsometry[J]. Optics Express, 26, 34396-34411(2018).

[10] de Groot P. Principles of interference microscopy for the measurement of surface topography[J]. Advances in Optics and Photonics, 7, 1-65(2015).

[11] Li S K, Wang X Z, Tang F et al. Nonsubsampled contourlet transform method for optical fringe pattern analysis in profilometry and interferometry[J]. Applied Optics, 55, 7718-7725(2016).

[12] Deng Q Y, Tang Y, Zhou Y et al. High-resolution surface topography measurement based on frequency-domain analysis in white light interferometry[J]. Chinese Journal of Lasers, 45, 0604001(2018).

[13] Zhu R H, Sun Y, Shen H. Progress and prospect of optical freeform surface measurement[J]. Acta Optica Sinica, 41, 0112001(2021).

[14] Wang C C, Lee C W, Huang C Y et al. Observation of nanoparticle internalization on cellular membranes by using noninterferometric widefield optical profilometry[J]. Applied Optics, 47, 2458(2008).

[15] Wang W, Wang J, Huang Y Y et al. Surface defect detection in transparent objects using polarized transmission structured light[J]. Acta Optica Sinica, 41, 1812002(2021).

[16] Neil M A, Juskaitis R, Wilson T. Method of obtaining optical sectioning by using structured light in a conventional microscope[J]. Optics Letters, 22, 1905-1907(1997).

[17] Gustafsson M G L, Shao L, Carlton P M et al. Three-dimensional resolution doubling in wide-field fluorescence microscopy by structured illumination[J]. Biophysical Journal, 94, 4957-4970(2008).

[18] York A G, Chandris P, Nogare D D et al. Instant super-resolution imaging in live cells and embryos via analog image processing[J]. Nature Methods, 10, 1122-1126(2013).

[19] Xie Z Y, Tang Y, Feng J H et al. Accurate surface profilometry using differential optical sectioning microscopy with structured illumination[J]. Optics Express, 27, 11721-11733(2019).

[20] Heist S, Zhang C, Reichwald K et al. 5D hyperspectral imaging: fast and accurate measurement of surface shape and spectral characteristics using structured light[J]. Optics Express, 26, 23366-23379(2018).

[21] Xie Z Y, Tang Y, Zhou Y et al. Surface and thickness measurement of transparent thin-film layers utilizing modulation-based structured-illumination microscopy[J]. Optics Express, 26, 2944-2953(2018).

[22] Xie Z Y, Liu X, yang K J et al. Fast thickness measurement of thin films using two-dimensional Fourier transform-based structured illumination microscopy[J]. Proceedings of SPIE, 10841, 1084105(2019).

[23] Yang K J, Han C, Feng J H et al. Film thickness-profile measurement using iterative peak separation structured illumination microscopy[J]. Applied Sciences, 11, 3023(2021).

[24] Nayar S K, Nakagawa Y. Shape from focus: an effective approach for rough surfaces[C], 218-225(1990).

[25] Dan D, Yao B L, Lei M. Structured illumination microscopy for super-resolution and optical sectioning[J]. Chinese Science Bulletin, 59, 1291-1307(2014).

[26] Wang T Y, Huang L, Kang H et al. RIFTA: a robust iterative Fourier transform-based dwell time algorithm for ultra-precision ion beam figuring of synchrotron mirrors[J]. Scientific Reports, 10, 8135(2020).