Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Acta Optica Sinica, Volume. 43, Issue 23, 2315001(2023)

Lithography Hotspot Detection Based on Improved YOLOv3

Mu Lin, Fanwenqing Zeng, Xiaoxuan Liu, Fencheng Li, Jun Luo, and Yijiang Shen*
Author Affiliations
  • School of Automation, Guangdong University of Technology, Guangzhou 510006, Guangdong , China
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (12)
    Equations (0)
    References (16)
    Cited By (6)
    Tools
    Paper Information
    Topics
    Cited By

    Article index updated: Sep. 6, 2025

    The article is cited by 6 article(s) CLP online library. (Some content might be in Chinese.)
    Tools

    Get Citation

    Copy Citation Text

    Mu Lin, Fanwenqing Zeng, Xiaoxuan Liu, Fencheng Li, Jun Luo, Yijiang Shen. Lithography Hotspot Detection Based on Improved YOLOv3[J]. Acta Optica Sinica, 2023, 43(23): 2315001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: Machine Vision

    Received: May. 5, 2023

    Accepted: Aug. 29, 2023

    Published Online: Dec. 8, 2023

    The Author Email: Yijiang Shen (yjshen@gdut.edu.cn)

    DOI:10.3788/AOS230928

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology