Chinese Journal of Liquid Crystals and Displays, Volume. 35, Issue 10, 1026(2020)
Influence of gate profile on TFT manufacturing process
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LIU Dan, LIU Yi, HUANG Zhong-hao, GAO Kun-kun, WU Xu, TIAN Mao-kun, WANG Kai, ZHANG Chao, WANG Rui, MIN Tai-ye, FENG Jia-hai, FANG Liang. Influence of gate profile on TFT manufacturing process[J]. Chinese Journal of Liquid Crystals and Displays, 2020, 35(10): 1026
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Received: Mar. 20, 2020
Accepted: --
Published Online: Jan. 22, 2021
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