Semiconductor Optoelectronics, Volume. 46, Issue 4, 722(2025)

High-Precision Non-Contact Micro-Measurement Technique Based on Vortex Light

YUAN Tao1, LIU Ji1, WU Jinhui2, ZHANG Boyang1, and YANG Xuejiao1
Author Affiliations
  • 1School of Information and Communication Engineering
  • 2School of Instrument and Electronics, North University of China, Taiyuan 030051, CHN
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    References(6)

    [1] [1] Dou J, He X, Hu Y, et al. Focal length measurement based on vortex beam interference[J]. Optics and Lasers in Engineering, 2024, 178: 108197.

    [2] [2] Zhang L, Cao J, Wu S, et al. From concept to reality: computing visual vortex beam interferometer for displacement measurement[J]. Optics Letters, 2022, 47(21): 5449-5452.

    [3] [3] Ye G, Yuan T, Zhang Y, et al. Recent progress on laser interferometry based on vortex beams: Status, challenges, and perspectives[J]. Optics and Lasers in Engineering, 2024, 17: 107871.

    [4] [4] Qiu S, Zhu X, Tang R, et al. Noncoaxial RDE of circular asymmetry optical vortex for rotating axis detection[J]. Photonics Research, 2022, 10(11), 2541-2548.

    [5] [5] Gao H, Yang D, Hu X, et al. High-precision micro-displacement measurement in a modified reversal shearing interferometer using vortex beams[J]. Optics Communications, 2023, 537: 129454.

    [8] [8] Lu H, Hao Y, Guo C, et al. Nano-displacement measurement system using a modified orbital angular momentum interferometer[J]. IEEE Journal of Quantum Electronics, 2022, 58(2): 1-5.

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    YUAN Tao, LIU Ji, WU Jinhui, ZHANG Boyang, YANG Xuejiao. High-Precision Non-Contact Micro-Measurement Technique Based on Vortex Light[J]. Semiconductor Optoelectronics, 2025, 46(4): 722

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    Paper Information

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    Received: Apr. 25, 2025

    Accepted: Sep. 18, 2025

    Published Online: Sep. 18, 2025

    The Author Email:

    DOI:10.16818/j.issn1001-5868.20240925005

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