Semiconductor Optoelectronics, Volume. 46, Issue 4, 722(2025)

High-Precision Non-Contact Micro-Measurement Technique Based on Vortex Light

YUAN Tao1, LIU Ji1, WU Jinhui2, ZHANG Boyang1, and YANG Xuejiao1
Author Affiliations
  • 1School of Information and Communication Engineering
  • 2School of Instrument and Electronics, North University of China, Taiyuan 030051, CHN
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    YUAN Tao, LIU Ji, WU Jinhui, ZHANG Boyang, YANG Xuejiao. High-Precision Non-Contact Micro-Measurement Technique Based on Vortex Light[J]. Semiconductor Optoelectronics, 2025, 46(4): 722

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    Paper Information

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    Received: Apr. 25, 2025

    Accepted: Sep. 18, 2025

    Published Online: Sep. 18, 2025

    The Author Email:

    DOI:10.16818/j.issn1001-5868.20240925005

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