Chinese Journal of Lasers, Volume. 49, Issue 21, 2104003(2022)

Off-Axis Point Wave Aberration Testing for Imaging Lens Based on Phase Measuring Deflectometry

Yilang Ruan1, Dahai Li1,2、*, Linzhi Yu1, Xinwei Zhang1, and Xiangtian Xiao1
Author Affiliations
  • 1College of Electronics and Information Engineering, Sichuan University, Chengdu 610065, Sichuan, China
  • 2School of Aeronautics and Astronautics, Sichuan University, Chengdu 610065, Sichuan, China
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    Figures & Tables(14)
    Geometry diagram of off-axis wave aberration
    Model of reversed optical path for off-axis wave aberration
    Off-axis point wave aberration measurement system based on PMD
    Forward wave aberrations, reversed wave aberrations and their differences of plano-convex lens at different fileds. (a)-(c) 0° half field angle; (d)-(f) 3° half field angle; (g)-(i) 5° half field angle
    Zernike coefficient comparison between wave aberration and reversed wave aberration of plano-convex lens at 5° half field angle
    Coefficients of primary coma and astigmatism of plano-convex lens under different conditions. (a) Different field angles with aperture of 75 mm; (b) different apertures with field angle of 5°
    Experimental devices. (a) Diagram of measuring device; (b) plano-convex lens to be measured
    Acquired fringe patterns. (a) Fringes with lens; (b) fringes without lens
    Transmission fringe images under different fields of view
    Experimental and simulated wave aberrations after removing first four terms of Zernike polynomials. (a)-(c) 0° half field angle; (d)-(f) 3° half field angle; (g)-(i) 5° half field angle
    Experimental and simulated results at 5.17° half field angle
    Coefficients of primary coma and astigmatism of plano-convex lens under different conditions. (a) Different field angles with aperture of 60 mm; (b) different apertures with field angle of 5.17°
    • Table 1. RMS and PV values of forward and reversed wave aberrations at different field angles

      View table

      Table 1. RMS and PV values of forward and reversed wave aberrations at different field angles

      Aberration
      Forward wave aberrationRMS of 1311.1 nm,PV of 4403.2 nmRMS of 2946.6 nm,PV of 12140.9 nmRMS of 5944.6 nm,PV of 27002.8 nm
      Reversed wave aberrationRMS of 1303.9 nm,PV of 4377.4 nmRMS of 2946.1 nm,PV of 13248.7 nmRMS of 5958.7 nm,PV of 27436.0 nm
      DifferenceRMS of 7.3 nm,PV of 25.8 nmRMS of 43.2 nm,PV of 281.1 nmRMS of 144.6 nm,PV of 949.1 nm
    • Table 2. RMS and PV values of PMD and simulated results at different field angles

      View table

      Table 2. RMS and PV values of PMD and simulated results at different field angles

      Result2.88°5.17°
      PMD resultRMS of 168.6 nm,PV of 721.2 nmRMS of 500.5 nm,PV of 2605.9 nmRMS of 1580.3 nm,PV of 8201.8 nm
      Simulated resultRMS of 160.9 nm,PV of 540.8 nmRMS of 530.5 nm,PV of 2811.1 nmRMS of 1613.9 nm,PV of 8418.7 nm
      DifferenceRMS of 36.3 nm,PV of 253.7 nmRMS of 61.1 nm,PV of 373.1 nmRMS of 82.4 nm,PV of 479.1 nm
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    Yilang Ruan, Dahai Li, Linzhi Yu, Xinwei Zhang, Xiangtian Xiao. Off-Axis Point Wave Aberration Testing for Imaging Lens Based on Phase Measuring Deflectometry[J]. Chinese Journal of Lasers, 2022, 49(21): 2104003

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    Paper Information

    Category: Measurement and metrology

    Received: Jan. 14, 2022

    Accepted: Mar. 3, 2022

    Published Online: Oct. 14, 2022

    The Author Email: Li Dahai (lidahai@scu.edu.cn)

    DOI:10.3788/CJL202249.2104003

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