Opto-Electronic Engineering, Volume. 51, Issue 8, 240095(2024)
Research progress and prospects of metasurface polarization devices
[1] Wang X. Research on ground target recognition based on multi-angle and multispectral polarimetric remote sensing[D](2021).
[2] Liang T Q, Zhao Q, Sun X B et al. Research on image restoration by polarized remotesensing through haze[J]. Geomatics Inf Sci Wuhan Univ, 39, 244-247(2014).
[3] Han P L, Liu F, Wei Y et al. Optical correlation assists to enhance underwater polarization imaging performance[J]. Opt Lasers Eng, 134, 106256(2020).
[4] Bai X Y, Liang Z D, Zhu Z M et al. Polarization-based underwater geolocalization with deep learning[J]. eLight, 3, 15(2023).
[5] Smith M H. Interpreting Mueller matrix images of tissues[J]. Proc SPIE, 4257, 82-89(2001).
[7] Chenault D B, Vaden J P, Mitchell D A et al. Infrared polarimetric sensing of oil on water[J]. Proc SPIE, 9999, 99990D(2016).
[8] Andre Y, Laherrere J M, Bret-Dibat T et al. Instrumental concept and performances of the POLDER instrument[J]. Proc SPIE, 2572, 79-90(1995).
[9] Gaiarin S, Perego A M, da Silva E P et al. Dual-polarization nonlinear Fourier transform-based optical communication system[J]. Optica, 5, 263-270(2018).
[10] Gao S K, Mondal S B, Zhu N et al. Image overlay solution based on threshold detection for a compact near infrared fluorescence goggle system[J]. J Biomed Opt, 20, 016018(2015).
[11] Lane C, Rode D, Rösgen T. Two-dimensional birefringence measurement technique using a polarization camera[J]. Appl Opt, 60, 8435-8444(2021).
[12] Bouhy J, Dekoninck A, Voué M et al. Analysis of accuracy and ambiguities in spatial measurements of birefringence in uniaxial anisotropic media[J]. Appl Opt, 61, 8081-8090(2022).
[13] Zheng W H, Xing M X, Ren G et al. Integration of a photonic crystal polarization beam splitter and waveguide bend[J]. Opt Express, 17, 8657-8668(2009).
[14] Lu M F, Liao S M, Huang Y T. Ultracompact photonic crystal polarization beam splitter based on multimode interference[J]. Appl Opt, 49, 724-731(2010).
[15] Chen S H, Wang C H, Yeh Y W et al. Polarization filters with an autocloned symmetric structure[J]. Appl Opt, 50, C368-C372(2011).
[16] Zhu J K, Wu F Q, Ren S F et al. Research and development prospects of the subwavelength grating polarizer[J]. Laser J, 33, 1-3(2012).
[17] Hsiao H H, Chu C H, Tsai D P. Fundamentals and applications of metasurfaces[J]. Small Methods, 1, 1600064(2017).
[18] Kim J, Rana A S, Kim Y et al. Chiroptical metasurfaces: principles, classification, and applications[J]. Sensors, 21, 4381(2021).
[19] Tsilipakos O, Tasolamprou A C, Pitilakis A et al. Toward intelligent metasurfaces: the progress from globally tunable metasurfaces to software‐defined metasurfaces with an embedded network of controllers[J]. Adv Opt Mater, 8, 2000783(2020).
[20] Arbabi A, Horie Y, Bagheri M et al. Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission[J]. Nat Nanotechnol, 10, 937-943(2015).
[21] Mueller J P B, Rubin N A, Devlin R C et al. Metasurface polarization optics: independent phase control of arbitrary orthogonal states of polarization[J]. Phys Rev Lett, 118, 113901(2017).
[22] Park H, Crozier K B. Elliptical silicon nanowire photodetectors for polarization-resolved imaging[J]. Opt Express, 23, 7209-7216(2015).
[23] Hu Y Q, Wang X D, Luo X H et al. All-dielectric metasurfaces for polarization manipulation: principles and emerging applications[J]. Nanophotonics, 9, 3755-3780(2020).
[24] Li Z Y, Jin W Q. Research progress of short-wavelength infrared polarization imaging technologies[J]. J Appl Opt, 44, 643-654(2023).
[25] Lin J, Wang D P, Si G Y. Recent progress on plasmonic metasurfaces[J]. Opto-Electron Eng, 44, 289-296(2017).
[26] Liu B, Xie X, Gan X T et al. Applications and progress of all-metal metasurfaces in phase manipulation of electromagnetic waves[J]. Opto-Electron Eng, 50, 230119(2023).
[27] Hu J, Bandyopadhyay S, Liu Y H et al. A review on metasurface: from principle to smart metadevices[J]. Front Phys, 8, 586087(2021).
[28] Zhou J Z, Hao J, Yu X C et al. Recent advances in metasurfaces for polarization imaging[J]. Chin Opt, 16, 973-995(2023).
[29] Ke L, Zhang S M, Li C X et al. Research progress on hybrid vector beam implementation by metasurfaces[J]. Opto-Electron Eng, 50, 230117(2023).
[30] He J W, Dong T, Zhang Y. Development of metasurfaces for wavefront modulation in terahertz waveband[J]. Infrared Laser Eng, 49, 20201033(2020).
[31] Wan Y Q, Liu W J, Lin R Y et al. Research progress and applications of spectral imaging based on metasurfaces[J]. Opto-Electron Eng, 50, 230139(2023).
[32] Gao H, Fan X H, Xiong W et al. Recent advances in optical dynamic meta-holography[J]. Opto-Electron Adv, 4, 210030(2021).
[33] Guo Z Y, Wang X Y, Li D K et al. Advances on theory and application of polarization information propagation (Invited)[J]. Infrared Laser Eng, 49, 20201013(2020).
[34] Li Z Y, Zhai A P, Ji Y Z et al. Research, application and progress of optical polarization imaging technology[J]. Infrared Laser Eng, 52, 20220808(2023).
[36] Zhang L, Liang X Z, Lin Q et al. Research progress of hybrid vector beams (Invited)[J]. Infrared Laser Eng, 50, 20210447(2021).
[37] Yu N F, Genevet P, Kats M A et al. Light propagation with phase discontinuities: generalized laws of reflection and refraction[J]. Science, 334, 333-337(2011).
[38] Pors A, Albrektsen O, Radko I P et al. Gap plasmon-based metasurfaces for total control of reflected light[J]. Sci Rep, 3, 2155(2013).
[39] Khorasaninejad M, Chen W T, Devlin R C et al. Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging[J]. Science, 352, 1190-1194(2016).
[40] Huang Y W, Lee H W H, Sokhoyan R et al. Gate-tunable conducting oxide metasurfaces[J]. Nano Lett, 16, 5319-5325(2016).
[41] Kim T T, Kim H, Kenney M et al. Amplitude modulation of anomalously refracted terahertz waves with gated‐graphene metasurfaces[J]. Adv Opt Mater, 6, 1700507(2018).
[42] Li J, Li J T, Zhang Y T et al. All-optical switchable terahertz spin-photonic devices based on vanadium dioxide integrated metasurfaces[J]. Opt Commun, 460, 124986(2020).
[43] Luo X Q, Huang W L, Wang B X et al. Terahertz graphene metasurfaces antennas for dynamic phase modulation and beam steering[J]. J Integr Technol, 12, 77-90(2023).
[44] Huang J J, Yin X N, Xu M et al. Switchable coding metasurface for flexible manipulation of terahertz wave based on Dirac semimetal[J]. Results Phys, 33, 105204(2022).
[45] Zheng L, Song Z T, Song W X et al. Fabrication of stable multi-level resistance states in a Nb-doped Ge2Sb2Te5 device[J]. J Mater Chem C, 11, 3770-3777(2023).
[46] Yu F L, Chen J, Zhao Z Y et al. A forward calculation method to quickly realize the achromatic metasurface for arbitrary polarization control[J]. J Infrared Millim Waves, 41, 792-798(2022).
[47] Gao Y H, Tian Y, Du Q G et al. High efficiency and high transmission asymmetric polarization converter with chiral metasurface in visible and near-infrared[J]. Chin Phys B, 32, 074201(2023).
[48] Zhang F, Cai J X, Pu M B et al. Composite-phase manipulation in optical metasurfaces[J]. Physics, 50, 300-307(2021).
[49] Zhang R Z, Zhang R, Wang Z B et al. Liquid refractive index sensor based on terahertz metamaterials[J]. Plasmonics, 17, 457-465(2022).
[50] Li X T, Li Y, Li C et al. High color saturation and angle-insensitive ultrathin color filter based on effective medium theory[J]. Chin Opt Lett, 21, 033602(2023).
[51] Berry M V. Quantal phase factors accompanying adiabatic changes[J]. Proc Roy Soc A: Math, Phys Eng Sci, 392, 45-57(1984).
[52] Tal M, Haim D B, Ellenbogen T. Geometric phase opens new frontiers in nonlinear frequency conversion of light[J]. Front Phys, 17, 12302(2022).
[53] Li G X, Chen S M, Pholchai N et al. Continuous control of the nonlinearity phase for harmonic generations[J]. Nat Mater, 14, 607-612(2015).
[54] Wen D D, Yue F Y, Li G X et al. Helicity multiplexed broadband metasurface holograms[J]. Nat Commun, 6, 8241(2015).
[55] Chen S M, Zeuner F, Weismann M et al. Giant nonlinear optical activity of achiral origin in planar metasurfaces with quadratic and cubic nonlinearities[J]. Adv Mater, 28, 2992-2999(2016).
[56] Li G X, Zhang S, Zentgraf T. Nonlinear photonic metasurfaces[J]. Nat Rev Mater, 2, 17010(2017).
[57] Sun Z Y, Yi Y F, Song T C et al. Giant nonreciprocal second-harmonic generation from antiferromagnetic bilayer CrI3[J]. Nature, 572, 497-501(2019).
[58] Mao N B, Zhang G Q, Tang Y T et al. Nonlinear vectorial holography with quad-atom metasurfaces[J]. Proc Natl Acad Sci USA, 119, e2204418119(2022).
[59] Xie X, Pu M B, Jin J J et al. Generalized Pancharatnam-Berry phase in rotationally symmetric meta-atoms[J]. Phys Rev Lett, 126, 183902(2021).
[60] Luo X G. Principles of electromagnetic waves in metasurfaces[J]. Sci China Phys, Mech Astron, 58, 594201(2015).
[61] Wang M J, Huang Z J, Salut R et al. Plasmonic helical nanoantenna as a converter between longitudinal fields and circularly polarized waves[J]. Nano Lett, 21, 3410-3417(2021).
[62] Shu J, Qiu C Y, Astley V et al. High-contrast terahertz modulator based on extraordinary transmission through a ring aperture[J]. Opt Express, 19, 26666-26671(2011).
[63] Tan Y J, Zhang L, Sun T X et al. Polarization compensation method based on the wave plate group in phase mismatch for free-space quantum key distribution[J]. EPJ Quantum Technol, 10, 6(2023).
[64] Lin S T, Le Q H, Chen S H et al. Heterodyne polariscope for measuring the principal angle and phase retardation of stressed plastic substrates[J]. Measurement, 175, 109096(2021).
[65] Chen Q H, Zhou S, Ding J H et al. Three-dimensional temperature field measurement based on multi-step phase shift method and polarization interference optical tomography optical path[J]. Acta Opt Sin, 42, 0712004(2022).
[66] Han B W, Li S J, Cao X Y et al. Dual-band transmissive metasurface with linear to dual-circular polarization conversion simultaneously[J]. AIP Adv, 10, 125025(2020).
[67] Deng Y D, Wu C, Meng C et al. Functional metasurface quarter-wave plates for simultaneous polarization conversion and beam steering[J]. ACS Nano, 15, 18532-18540(2021).
[68] He H J, Tang S W, Zheng Z W et al. Multifunctional all-dielectric metasurface quarter-wave plates for polarization conversion and wavefront shaping[J]. Opt Lett, 47, 2478-2481(2022).
[69] Ahmad M, Liu J, Qureshi U U R. Wideband reflective half-and quarter-wave plate metasurface based on multi-plasmon resonances[J]. Opt Continuum, 2, 1242-1255(2023).
[70] Ding F, Chang B D, Wei Q S et al. Versatile polarization generation and manipulation using dielectric metasurfaces[J]. Laser Photonics Rev, 14, 2000116(2020).
[71] Gao S, Zhou C Y, Yue W J et al. Efficient all-dielectric diatomic metasurface for linear polarization generation and 1-bit phase control[J]. ACS Appl Mater Interfaces, 13, 14497-14506(2021).
[72] Ren Y Z, Guo S H, Zhu W Q et al. Full‐stokes polarimetry for visible light enabled by an all‐dielectric metasurface[J]. Adv Photonics Res, 3, 2100373(2022).
[73] Rong Z H, Kuang C F, Fang Y et al. Super-resolution microscopy based on fluorescence emission difference of cylindrical vector beams[J]. Opt Commun, 354, 71-78(2015).
[74] Wang X L, Chen J, Li Y N et al. Optical orbital angular momentum from the curl of polarization[J]. Phys Rev Lett, 105, 253602(2010).
[75] Gu B, Hu Y Q, Zhang X B et al. Angular momentum separation in focused fractional vector beams for optical manipulation[J]. Opt Express, 29, 14705-14719(2021).
[76] Zhan Q W. Cylindrical vector beams: from mathematical concepts to applications[J]. Adv Opt Photonics, 1, 1-57(2009).
[77] Segawa S, Kozawa Y, Sato S. Demonstration of subtraction imaging in confocal microscopy with vector beams[J]. Opt Lett, 39, 4529-4532(2014).
[78] Zhu L, Wang J. A review of multiple optical vortices generation: methods and applications[J]. Front Optoelectron, 12, 52-68(2019).
[79] Lavery M P J, Speirits F C, Barnett S M et al. Detection of a spinning object using light’s orbital angular momentum[J]. Science, 341, 537-540(2013).
[80] Jin J J, Pu M B, Wang Y Q et al. Multi‐channel vortex beam generation by simultaneous amplitude and phase modulation with two‐dimensional metamaterial[J]. Adv Mater Technol, 2, 1600201(2017).
[81] Guo Q H, Schlickriede C, Wang D Y et al. Manipulation of vector beam polarization with geometric metasurfaces[J]. Opt Express, 25, 14300-14307(2017).
[82] Ou K, Yu F L, Li G H et al. Mid-infrared polarization-controlled broadband achromatic metadevice[J]. Sci Adv, 6, eabc0711(2020).
[83] Kong Q, Gu M N, Zeng X Y et al. Metasurface of combined semicircular rings with orthogonal slit pairs for generation of dual vector beams[J]. Nanomaterials, 11, 1718(2021).
[84] Fu P, Ni P N, Wu B et al. Metasurface enabled on-chip generation and manipulation of vector beams from vertical cavity surface-emitting lasers[J]. Adv Mater, 35, 2204286(2023).
[85] Shafqat M D, Mahmood N, Akbar J et al. Broadband multifunctional metasurfaces for concentric perfect vortex beam generation via trigonometric functions[J]. Opt Mater Express, 14, 125-138(2024).
[86] Wei R, Bao Y J. Metasurface-based multidimensional optical information encryption[J]. Chin J Lasers, 50, 1813004(2023).
[87] Xiong B, Liu Y, Xu Y H et al. Breaking the limitation of polarization multiplexing in optical metasurfaces with engineered noise[J]. Science, 379, 294-299(2023).
[88] Deng J, Li Z L, Li J X et al. Metasurface-assisted optical encryption carrying camouflaged information[J]. Adv Opt Mater, 10, 2200949(2022).
[89] Liu S L, Wang X H, Ni J C et al. Optical encryption in the photonic orbital angular momentum dimension via direct-laser-writing 3D chiral metahelices[J]. Nano Lett, 23, 2304-2311(2023).
[90] Yang H, He P, Ou K et al. Angular momentum holography via a minimalist metasurface for optical nested encryption[J]. Light Sci Appl, 12, 79(2023).
[91] Ren H R, Fang X Y, Jang J et al. Complex-amplitude metasurface-based orbital angular momentum holography in momentum space[J]. Nat Nanotechnol, 15, 948-955(2020).
[92] Guo X Y, Li P, Zhong J Z et al. Stokes meta-hologram toward optical cryptography[J]. Nat Commun, 13, 6687(2022).
[93] Ji J T, Chen C, Sun J C et al. High-dimensional Poincaré beams generated through cascaded metasurfaces for high-security optical encryption[J]. PhotoniX, 5, 13(2024).
[94] Kakichashvili S D. Method for phase polarization recording of holograms[J]. Sov J Quantum Electron, 4, 795-798(1974).
[95] Mu Y H, Zheng M Y, Qi J R et al. A large field-of-view metasurface for complex-amplitude hologram breaking numerical aperture limitation[J]. Nanophotonics, 9, 4749-4759(2020).
[96] Zhao R Z, Huang L L, Wang Y T. Recent advances in multi-dimensional metasurfaces holographic technologies[J]. PhotoniX, 1, 20(2020).
[97] Zhao R Z, Sain B, Wei Q S et al. Multichannel vectorial holographic display and encryption[J]. Light Sci Appl, 7, 95(2018).
[98] Song Q, Khadir S, Vézian S et al. Bandwidth-unlimited polarization-maintaining metasurfaces[J]. Sci Adv, 7, eabe1112(2021).
[99] Zhu L, Wei J X, Dong L et al. Four-channel meta-hologram enabled by a frequency-multiplexed mono-layered geometric phase metasurface[J]. Opt Express, 32, 4553-4563(2024).
[100] Tyo J S, Goldstein D L, Chenault D B et al. Review of passive imaging polarimetry for remote sensing applications[J]. Appl Opt, 45, 5453-5469(2006).
[101] Andreou A G, Kalayjian Z K. Polarization imaging: principles and integrated polarimeters[J]. IEEE Sens J, 2, 566-576(2002).
[102] Nordin G P, Meier J T, Deguzman P C et al. Diffractive optical element for Stokes vector measurement with a focal plane array[J]. Proc SPIE, 3754, 169-177(1999).
[103] Yang W, Wang X M, Shi L et al. A dual-camera polarization imaging system based on Stokes vector[J]. Electron Opt Control, 28, 72-75,89(2021).
[104] Rubin N A, D’Aversa G, Chevalier P et al. Matrix Fourier optics enables a compact full-Stokes polarization camera[J]. Science, 365, eaax1839(2019).
[105] Yan C, Li X, Pu M B et al. Midinfrared real-time polarization imaging with all-dielectric metasurfaces[J]. Appl Phys Lett, 114, 161904(2019).
[106] Zhang C, Hu J P, Dong Y G et al. High efficiency all-dielectric pixelated metasurface for near-infrared full-Stokes polarization detection[J]. Photonics Res, 9, 583-589(2021).
[107] Cheng B, Song G F. Full-Stokes polarization photodetector based on the hexagonal lattice chiral metasurface[J]. Opt Express, 31, 30993-31004(2023).
[108] Park H S, Park J, Son J et al. A general recipe for nondispersive optical activity in bilayer chiral metamaterials[J]. Adv Opt Mater, 7, 1801729(2019).
[109] Roberts N W, Chiou T H, Marshall N J et al. A biological quarter-wave retarder with excellent achromaticity in the visible wavelength region[J]. Nat Photonics, 3, 641-644(2009).
[110] Basiri A, Chen X H, Bai J et al. Nature-inspired chiral metasurfaces for circular polarization detection and full-Stokes polarimetric measurements[J]. Light Sci Appl, 8, 78(2019).
[111] Zuo J, Bai J, Choi S et al. Chip-integrated metasurface full-Stokes polarimetric imaging sensor[J]. Light Sci Appl, 218(2023).
[112] Vieu C, Carcenac F, Pépin A et al. Electron beam lithography: resolution limits and applications[J]. Appl Surf Sci, 164, 111-117(2000).
[113] Qin N, Qian Z G, Zhou C Z et al. 3D electron-beam writing at sub-15 nm resolution using spider silk as a resist[J]. Nat Commun, 12, 5133(2021).
[114] Zhu C X, Ekinci H, Pan A X et al. Electron beam lithography on nonplanar and irregular surfaces[J]. Microsyst Nanoeng, 10, 52(2024).
[116] Szafraniak B, Fuśnik Ł, Xu J et al. Semiconducting metal oxides: SrTiO3, BaTiO3 and BaSrTiO3 in gas-sensing applications: a review[J]. Coatings, 11, 185(2021).
[117] Keskinbora K, Robisch A L, Mayer M et al. Recent advances in use of atomic layer deposition and focused ion beams for fabrication of Fresnel zone plates for hard x-rays[J]. Proc SPIE, 8851, 885119(2013).
[118] Mayer M, Keskinbora K, Grévent C et al. Efficient focusing of 8 keV X-rays with multilayer Fresnel zone plates fabricated by atomic layer deposition and focused ion beam milling[J]. J Synchrotron Radiat, 20, 433-440(2013).
[119] Tseng M L, Lin Z H, Kuo H Y et al. Stress-induced 3D chiral fractal metasurface for enhanced and stabilized broadband near-field optical chirality[J]. Adv Opt Mater, 7, 1900617(2019).
[120] Xu K, Wang X E, Fan X H et al. Meta-holography: from concept to realization[J]. Opto-Electron Eng, 49, 220183(2022).
[121] Zhou W P, Bai S, Xie Z W et al. Research progress of laser direct writing fabrication of metal and carbon micro/nano structures and devices[J]. Opto-Electron Eng, 49, 210330(2022).
[122] Berzinš J, Indrišiūnas S, Van Erve K et al. Direct and high-throughput fabrication of mie-resonant metasurfaces via single-pulse laser interference[J]. ACS Nano, 14, 6138-6149(2020).
[123] Min S Y, Li S J, Zhu Z Y et al. Ultrasensitive molecular detection by imaging of centimeter-scale metasurfaces with a deterministic gradient geometry[J]. Adv Mater, 33, 2100270(2021).
[124] Park J S, Zhang S Y, She A L et al. All-glass, large metalens at visible wavelength using deep-ultraviolet projection lithography[J]. Nano Lett, 19, 8673-8682(2019).
[125] Zhang L D, Chang S Y, Chen X et al. High-efficiency, 80 mm aperture metalens telescope[J]. Nano Lett, 23, 51-57(2023).
[126] Hu T, Zhong Q Z, Li N X et al. CMOS-compatible a-Si metalenses on a 12-inch glass wafer for fingerprint imaging[J]. Nanophotonics, 9, 823-830(2020).
[127] Yoon G, Kim K, Kim S U et al. Printable nanocomposite metalens for high-contrast near-infrared imaging[J]. ACS Nano, 15, 698-706(2021).
[128] Yoon G, Kim K, Huh D et al. Single-step manufacturing of hierarchical dielectric metalens in the visible[J]. Nat Commun, 11, 2268(2020).
[129] Chen M K, Zhang J C, Leung C W et al. Chiral-magic angle of nanoimprint meta-device[J]. Nanophotonics, 12, 2479-2490(2023).
[130] Hao Z B, He X C, Li H D et al. Vertically aligned and ordered arrays of 2D MCo2S4@metal with ultrafast ion/electron transport for thickness-independent pseudocapacitive energy storage[J]. ACS Nano, 14, 12719-12731(2020).
[131] Xia D F, Ye L, Guo X et al. A dual-curable transfer layer for adhesion enhancement of a multilayer UV-curable nanoimprint resist system[J]. Appl Phys A, 108, 1-6(2012).
[132] Hu X, Yang T, Gu R H et al. A degradable polycyclic cross-linker for UV-curing nanoimprint lithography[J]. J Mater Chem C, 2, 1836-1843(2014).
[133] Qiu S, Ji J W, Sun W et al. Recent advances in surface manipulation using micro-contact printing for biomedical applications[J]. Smart Mater Med, 2, 65-73(2021).
[134] Wu C T, Utsunomiya T, Ichii T et al. Microstructured SiOx/COP stamps for patterning TiO2 on polymer substrates via microcontact printing[J]. Langmuir, 36, 10933-10940(2020).
[135] Zhang Y Y, Jiao Y L, Li C Z et al. Bioinspired micro/nanostructured surfaces prepared by femtosecond laser direct writing for multi-functional applications[J]. Int J Extrem Manuf, 2, 032002(2020).
[136] Yang S H, Ding C L, Zhu D Z et al. High-speed two-photon lithography based on femtosecond laser[J]. Opto-Electron Eng, 50, 220133(2023).
[137] Hulteen J C, Van Duyne R P. Nanosphere lithography: a materials general fabrication process for periodic particle array surfaces[J]. J Vac Sci Technol A, 13, 1553-1558(1995).
[138] Gottlieb S, Lorenzoni M, Evangelio L et al. Thermal scanning probe lithography for the directed self-assembly of block copolymers[J]. Nanotechnology, 28, 175301(2017).
[139] Jakšić Z, Vasiljević-Radović D, Maksimović M et al. Nanofabrication of negative refractive index metasurfaces[J]. Microelectron Eng, 83, 1786-1791(2006).
[140] Xu K, Chen J B. High-resolution scanning probe lithography technology: a review[J]. Appl Nanosci, 10, 1013-1022(2020).
[141] Fan P F, Gao J, Mao H et al. Scanning probe lithography: state-of-the-art and future perspectives[J]. Micromachines, 13, 228(2022).
[142] Garcia R, Knoll A W, Riedo E. Advanced scanning probe lithography[J]. Nat Nanotechnol, 9, 577-587(2014).
[143] Zheng X R, Calò A, Albisetti E et al. Patterning metal contacts on monolayer MoS2 with vanishing Schottky barriers using thermal nanolithography[J]. Nat Electron, 2, 17-25(2019).
[144] Yuan D D, Li J, Huang J X et al. Large-scale laser nanopatterning of multiband tunable mid-infrared metasurface absorber[J]. Adv Opt Mater, 10, 2200939(2022).
[145] Huang L Y, Xu K, Yuan D D et al. Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces[J]. Nat Commun, 13, 5823(2022).
[146] Ji W Y, Chang J, Xu H X et al. Recent advances in metasurface design and quantum optics applications with machine learning, physics-informed neural networks, and topology optimization methods[J]. Light Sci Appl, 12, 169(2023).
[147] Radford A, Metz L, Chintala S. Unsupervised representation learning with deep convolutional generative adversarial networks[C](2016).
[148] An S S, Fowler C, Zheng B W et al. A deep learning approach for objective-driven all-dielectric metasurface design[J]. ACS Photonics, 6, 3196-3207(2019).
[149] Liu D J, Tan Y X, Khoram E et al. Training deep neural networks for the inverse design of nanophotonic structures[J]. Acs Photonics, 5, 1365-1369(2018).
[151] Mall A, Patil A, Tamboli D et al. Fast design of plasmonic metasurfaces enabled by deep learning[J]. J Phys D Appl Phys, 53, 49LT01(2020).
[152] Zhu D Y, Liu Z C, Raju L et al. Building multifunctional metasystems via algorithmic construction[J]. ACS Nano, 15, 2318-2326(2021).
[153] Zhu T F, Guo C, Huang J Y et al. Topological optical differentiator[J]. Nat Commun, 12, 680(2021).
[154] Long O Y, Guo C, Wang H W et al. Isotropic topological second-order spatial differentiator operating in transmission mode[J]. Opt Lett, 46, 3247-3250(2021).
[155] Feng R, Tian Y K, Liu Y L et al. Polarization-multiplexed optical differentiation using topological metasurfaces[J]. Opto-Electron Eng, 50, 230172(2023).
[156] Duan J, Zhang H, Song J Y et al. Review of polarization image fusion based on deep learning[J]. Infrared Technol, 46, 119-128(2024).
[157] Zhao F, Cheng X M, Feng B et al. Comparison research of interpolation algorithms for division of focal plane polarization image[J]. Laser Optoelectron Prog, 57, 161014(2020).
[158] Li Y C, Yang S, Fu Q et al. Research on local feature extraction algorithm for polarized images based on deep learning (Invited)[J]. Electro-Opt Technol Appl, 37, 62-69(2022).
[159] Dong Y, Zhang F D, Yao Y et al. Mueller microscopy for digital pathology[J]. Sci Sin Vitae, 53, 480-504(2023).
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Haoxuan Wang, Yanlin He, Hangwei Zhu, Hang Dong, Shuning Wang. Research progress and prospects of metasurface polarization devices[J]. Opto-Electronic Engineering, 2024, 51(8): 240095
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Received: Apr. 26, 2024
Accepted: Jul. 8, 2024
Published Online: Nov. 12, 2024
The Author Email: Yanlin He (何彦霖)