Infrared Technology, Volume. 46, Issue 8, 858(2024)
Structural Design and Simulation of MEMS Infrared Light Source for CO2 Detection with Low Power Consumption
References(4)
[2] [2] LEE K N, LEE D S, JUNG S W, et al. A high-temperature MEMS heater using suspended silicon structures[J]. Journal of Micromechanics and Microengineering, 2009, 19(11): 115011.
[3] [3] Luca A D , Cole M T , Hopper R H , et al. SOI CMOS MEMS infrared thermal source with carbon nanotubes coating[C]//Elsevier BV, 2014: 839-842.
[4] [4] Sarkar S, Elsayed A A, Nefzaoui E, et al. NIR and MIR absorption of ultra-black silicon (UBS) application to high emissivity, all-silicon, light source[C]//2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) of IEEE, 2019: 860-862.
[12] [12] CHEN S J, CHEN B. Research on a CMOS-MEMS infrared sensor with reduced graphene oxide[J]. Sensors, 2020, 20(14): 4007.
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TENG Xuesong, YU Shenglin, WEI Zhijie, FANG Cun, XIONG Sixian, WANG Mengting. Structural Design and Simulation of MEMS Infrared Light Source for CO2 Detection with Low Power Consumption[J]. Infrared Technology, 2024, 46(8): 858
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