Infrared Technology, Volume. 46, Issue 8, 858(2024)
Structural Design and Simulation of MEMS Infrared Light Source for CO2 Detection with Low Power Consumption
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TENG Xuesong, YU Shenglin, WEI Zhijie, FANG Cun, XIONG Sixian, WANG Mengting. Structural Design and Simulation of MEMS Infrared Light Source for CO2 Detection with Low Power Consumption[J]. Infrared Technology, 2024, 46(8): 858
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