[1] [1] JOSEPH J, MA B, KHURI-YAKUB B T. Applications of capacitive micromachined ultrasonic transducers: A comprehensive review［J］. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2022, 69（2）: 456-467.

[2] [2] WONG L L P, CHEN A I H, LI Zhenhao, et al. A row-column addressed micromachined ultrasonic transducer array for surface scanning applications［J］. Ultrasonics, 2014, 54（8）: 2072-2080.

[3] [3] WANG Zhihao, ZHANG Wendong, WANG Renxin, et al. Investigation of submerged MEMS ultrasonic sensors for underwater obstacle avoidance application［J］. Remote Sensing, 2024, 16（3）: 497.

[4] [4] NA Shuai, CHEN A I H, WONG L L P, et al. Capacitive micromachined ultrasonic transducers based on annular cell geometry for air-coupled applications［J］. Ultrasonics, 2016, 71: 152-160.ZHANG Tian, ZHANG Wendong, SHAO Xingling, et al. Research on optimization sparse method for capacitive micromachined ultrasonic transducer array: heuristic algorithm［J］. Sensor Review, 2021, 41（3）: 260-270.

[5] [5] ZHANG Tian, ZHANG Wendong, SHAO Xingling, et al. Research on optimization sparse method for capacitive micromachined ultrasonic transducer array: heuristic algorithm［J］. Sensor Review, 2021, 41（3）: 260-270.

[6] [6] ZHANG Hui, LIANG Dongmei, WANG Zhuochen, et al. Fabrication and characterization of a wideband low-frequency CMUT array for air-coupled imaging［J］. IEEE Sensors Journal, 2020, 20（23）: 14090-14100.

[9] [9] ZHANG Sai, LU Wentao, WANG Ailing, et al. Optimization design of CMUT sensors with broadband and high sensitivity characteristics based on the genetic algorithm［J］. Sensors, 2024, 24（10）: 3155.

[10] [10] SHANMUGAM P, IGLESIAS L, MICHAUD J F, et al. Broad bandwidth air-coupled micromachined ultrasonic transducers for gas sensing［J］. Ultrasonics, 2021, 114: 106410.

[11] [11] HERICKHOFF C D, VAN SCHAIJK R. cMUT technology developments［J］. Zeitschrift Fr Medizinische Physik, 2023, 33（3）: 256-266.

[12] [12] YILDIZ F, MATSUNAGA T, HAGA Y. Capacitive micromachined ultrasonic transducer arrays incorporating anodically bondable low temperature co-fired ceramic for small diameter ultrasonic endoscope［J］. Micro & Nano Letters, 2016, 11（10）: 627-631.

[14] [14] LIU Jie, CHEN Haodong, LUO Youming, et al. Analytical and experimental study on bilayer membrane-type Capacitive Micromechanical Ultrasonic Transducer［J］. Sensors and Actuators A: Physical, 2024, 376: 115639.

[15] [15] GUPTA S, KOTHARI P, SHARMA R, et al. Design, modelling and FEM-based validation of composite membrane circular cMUT cell［J］. Microsystem Technologies, 2023, 29（11）: 1589-1600.

[16] [16] ZHENG Zhou, YAO Yao, SUN Yonghai, et al. Development of a highly sensitive humidity sensor based on the capacitive micromachined ultrasonic transducer［J］. Sensors and Actuators B: Chemical, 2019, 286: 39-45.

[17] [17] JIA Licheng, LIANG Yong, MENG Fansheng, et al. Research on acoustic impedance matching method of CMUT sensor based on PDMS/BN particles［J］. IEEE Sensors Journal, 2024, 24（15）: 24622-24629.