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Piezoelectrics & Acoustooptics, Volume. 47, Issue 2, 343(2025)

Research on CMUT Process Method and Performance Based on Cavity SOI

ZENG Xiangcheng, CHEN Jiaqi, SUN Jiali, WANG Renxin, JIA Licheng, and YANG Yuhua
Author Affiliations
  • State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China
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    ZENG Xiangcheng, CHEN Jiaqi, SUN Jiali, WANG Renxin, JIA Licheng, YANG Yuhua. Research on CMUT Process Method and Performance Based on Cavity SOI[J]. Piezoelectrics & Acoustooptics, 2025, 47(2): 343

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    Paper Information

    Received: Dec. 27, 2024

    Accepted: Jun. 17, 2025

    Published Online: Jun. 17, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.02.023

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology