Piezoelectrics & Acoustooptics, Volume. 47, Issue 2, 343(2025)

Research on CMUT Process Method and Performance Based on Cavity SOI

ZENG Xiangcheng, CHEN Jiaqi, SUN Jiali, WANG Renxin, JIA Licheng, and YANG Yuhua
Author Affiliations
  • State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China
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    Currently, underwater ultrasonic testing places higher demands on the structural size, sensitivity, and reliability of ultrasonic probes. This article proposes a method for designing and fabricating a capacitive micromechanical ultrasonic transducer(CMUT) based on cavity SOI technology and completes CMUT electrical performance testing and underwater performance characterization through packaging. The test results show that the CMUT fabricated using this method achieves higher yield and consistency. Its transmission voltage response level is 169.03 dB, reception sensitivity is −211.31 dB, and relative bandwidth is 121%, demonstrating excellent sensitivity characteristics and directionality (with a −6 dB beam width of 8°). This novel CMUT fabrication method provides theoretical support and a foundation for future high-density CMUT integration and underwater ultrasonic testing.

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    ZENG Xiangcheng, CHEN Jiaqi, SUN Jiali, WANG Renxin, JIA Licheng, YANG Yuhua. Research on CMUT Process Method and Performance Based on Cavity SOI[J]. Piezoelectrics & Acoustooptics, 2025, 47(2): 343

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    Paper Information

    Received: Dec. 27, 2024

    Accepted: Jun. 17, 2025

    Published Online: Jun. 17, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.02.023

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